Used AMAT / APPLIED MATERIALS System #293654409 for sale

AMAT / APPLIED MATERIALS Equipment is a high-performance plasma-enhanced chemical vapor deposition (PECVD) AMAT System. Its design is a single-wafer-style, all-metal-ceramic vacuum chamber which contains configurable dual capacitively coupled-plasma sources and multiple heating zones. This APPLIED MATERIALS Unit allows for precise control of film deposition and surface modification processes for a variety of applications, including semiconductors, optoelectronics and MEMS (Micro-Electro-Mechanical Systems). The dual plasma sources in Machine combine RF power with process gases for the generation of high-energy reactive species. These species are diffused across the heated wafer, resulting in uniform deposition and extensive surface modification. In addition, the polysilicon deposition process is also improved through the use of higher RF power and fine-tuned gas flow. The temperatures of the wafer are managed through an advanced thermal zone management AMAT / APPLIED MATERIALS Tool. This AMAT Asset consists of multiple independent heating temperatures, allowing for full control of thermal cycles. The temperature in each zone is monitored and adjusted using advanced PID (proportional, integral and derivative) control. The temperature planes of the process can also be precisely tuned to fit the needs of the application. The PECVD reactor also has a built-in Cold Cathode Ionization Vacuum (CCIV) pump, which provides the highest degree of vacuum control. This eliminates the requirement for an external vacuum pump, which reduces costs and enhances APPLIED MATERIALS Model performance. The CCIV pump is designed to handle the high volume of gases generated by Equipment while providing extremely low gas pressure. Finally, AMAT / APPLIED MATERIALS System can be integrated with AMAT process control software. This software allows users to remotely monitor and control the entire AMAT Unit, providing full visibility into the deposition and surface modification process. By automating the process, APPLIED MATERIALS Machine ensures optimum performance and efficiency.