Used AMAT / APPLIED MATERIALS TCG Rack for Centura RTP #293640872 for sale

AMAT / APPLIED MATERIALS TCG Rack for Centura RTP is an industrial reaction chamber designed to support the thermally-controlled growth of atomic layers used in semiconductor production. The chamber allows precise control over temperature, pressure, reactants, and environment during the reaction process. The unit is composed of a cylindrical reaction chamber, an outer chamber for power and control, a shield mounted between the two inner and outer shells, an inert gas introduction equipment, and several safety features. The inner chamber is constructed from a vacuum-sealed stainless steel alloy and is designed to withstand high pressures and temperatures. It has a cylindrical, concentric design for precise top-down flow distribution of process gases, a 7-inch window for optical access and RAMAN spectroscopy, a scalable gas box, and a unique port design to inject reactants or sample points close to substrates. The outer chamber, where the power and control mechanisms are housed, provides temperatures up to 1000°C and pressures up to 20 bar. It is configured with an inlet manifold, cooling system, exhaust vents, and various control valves. The shield is designed to absorb chemical vapors and provide thermal isolation between the inner and outer chamber, while the inert gas introduction unit allows for precise control of the reaction atmosphere. Lastly, various safety components, such as a passive cooling machine, thermal cutoff, and a full shutdown safety switch, are included to protect the unit from malfunction due to power outages or operator error. AMAT TCG Rack for Centura RTP is an advanced, highly configurable reaction chamber perfect for thermally-controlled growth of thin films. The thin and even layers produced through this unit help semiconductor production processes become reliable, precise, and efficient.