Used AMAT / APPLIED MATERIALS Ultima AZX-63 #9186153 for sale

ID: 9186153
HDP-CVD Systems.
AMAT / APPLIED MATERIALS Ultima AZX-63 is an advanced plasma etching reactor designed to provide superior electrical and chemical control for today's most demanding Plasma etching processes. Built on a reliable and proven platform, AMAT Ultima AZX-63 includes powerful features for the most demanding etching jobs. Its multi-frequency, pulsed power supply provides maximum flexibility and unmatched performance for etching of single or multiple layers. The proprietary direct-drive electro-mechanical platform of APPLIED MATERIALS Ultima AZX-63 provides significantly higher systematic and kinetic resolutions, significantly reducing particle-induced defects. This translates into significant improvement in product yields and output drives for the highest levels of process efficiency. Furthermore, the system includes an atmospheric-pressure plasma generator which is capable of working in both reactive and non-reactive process gases such as argon and nitrogen. This ensures greater uniformity and repeatability during etching processes. Ultima AZX-63 is equipped with the trademarked Cyclonus™ mechanical pump. This aesthetically designed pump is among the most efficient in the industry, with extremely low noise and vibration. The combination of robust rotor technology and a hermetically sealed motor chamber prevents any interference from the environment. Its unique design also enables high levels of compression and vacuum control, allowing for extremely precise etching results with low defects. AMAT / APPLIED MATERIALS Ultima AZX-63 also features integrated lifetime monitoring and control options, such as lifetime sensor, automatic substrate aligner, and Plasma Discriminator™. All of this makes it easy to achieve the highest process yields and to quickly establish new substrates process baselines. To ensure the highest levels of quality and safety in the laboratory, AMAT Ultima AZX-63 comes equipped with a sophisticated safety package. This includes an alarm system with warning beacons, adjustable flow safety valves, and remote burner control capabilities. Finally, APPLIED MATERIALS Ultima AZX-63 strives for easy maintenance and operation with automated shut down and error diagnosis capabilities for service and maintenance needs. With its advanced plasma etching capabilities and sophisticated safety features, Ultima AZX-63 is the ideal choice for precision plasma etching needs. Its performance and reliability are designed to keep pace with the most demanding, high-precision plasma etching applications.
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