Used AMAT / APPLIED MATERIALS Ultima HDP #293797292 for sale

AMAT / APPLIED MATERIALS Ultima HDP
ID: 293797292
Wafer Size: 8"
CVD Systems, 8" (3) HDP Chambers Cassette stage: 25-Position LL Type: Wide body Light tower: 4 Light Dual Hard Disk Drive (HDD) Gas type: SiF4, O2, SiH4, Ar, NF3 STEC Z512 MFC Process cooling Gas box exhaust SEC II/GEM (2) BROOKS AUTOMATION LPT2200 Smoke detector Monitor and light pen: (2) Flat panels with touch screen MFC Type: BROOKS AUTOMATION GF100 Type / Flow (SCCM) SiF4 / 100 O2 / 400 SiH4 / 200 Ar / 300 SiH4 / 20 Ar / 50 NF3 / 2000 Ar / 2000 Power supply: 208 V, 50 W, 3 Phase, 50 Hz.
AMAT / APPLIED MATERIALS Ultima HDP reactor is a plasma processing chamber used for the plasma deposition and etching of thin films. It is designed to deliver high quality uniformity and productivity in precision thin film deposition and etching processes. The HDP reactor is equipped with an advanced electron cyclotron resonance (ECR) magnetic field that delivers uniform plasma etching and deposition over a large area. The ECR produces a uniform electric field to ionize and accelerate gas molecules, producing a highly uniform plasma with more consistent etching and deposition. The HDP reactor is constructed of stainless steel and features a large process chamber with a high flow rate of coolant gas through the chamber for improved thermal uniformity. It also has a dual deposition source augmenting uniformity, with the ability to alternately switch between multiple plasmas in order to deposit multiple layers. AMAT Ultima HDP is a powerful tool for etching and depositing thin films with precision. It provides industry leading throughput, consistent uniformity, and superior microstructure control than traditional plasma processing tools. The improved uniformity and temperature control is in part due to a perforated wall design move the gases through the process chamber evenly. APPLIED MATERIALS Ultima HDP includes sophisticated pressure control and sensing technologies and capabilities. The HDP reactor allows for significant scaling and integration of processes, providing customers with improved throughput and productivity while increasing the level of control in the deposition and etching process. It is a versatile solution enabling direct integration with other components of the process, as well as integration into existing cleanroom environments. Ultima HDP is part of AMAT family of plasma processing tools, which has a wide variety of capabilities in etch, deposition, and surface modification. It is designed to meet the demands of today's high-tech research centers and manufacturing plants. backed by corporate-wide customer support from APPLIED MATERIALS, customers can get the best out of their technology and production processes.
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