Used AMAT / APPLIED MATERIALS Ultima HDP #9315128 for sale

AMAT / APPLIED MATERIALS Ultima HDP (High Density Plasma) reactor is a state-of-the-art process tool designed to enable the fabrication of advanced microelectronic circuits and devices. Developed in partnership with Plasma-Therm, AMAT Ultima HDP reactor provides high-throughput production of a wide range of materials and devices, including novel finFET and dual-gate architectures. APPLIED MATERIALS Ultima HDP reactor combines a high-density plasma (HDP) source with a multi-level cascaded plasma discharge chamber that is enclosed by a quartz chamber body and evacuated by a cold-wall dry process vacuum equipment. This combination of technology allows for high-throughput processing of the most difficult-to-process materials and devices. Ultima HDP reacts a wide range of gases, including Ar, H2, N2, O2 and H2O. The wide range of gases, coupled with an anodic electrical bias, allows for precise control of the chemical and physical processing parameters, enabling the processing of a wide range of materials, including Si, SiGe, SiC and GaAs. AMAT / APPLIED MATERIALS Ultima HDP reactor is equipped with a comprehensive set of diagnostics and a real-time monitoring system that can be used to monitor the process conditions throughout a run. The real-time monitoring unit includes gas sampling, particle counting, pressure monitoring, temperature monitoring, and electricity flow and bias monitoring. This real-time monitoring machine enables the user to adjust and optimize the process parameters to improve process repeatability and performance. The incorporated gas dosing tool also allows for improved control of the process chemistry and provides for improved efficiency in gas utilization. AMAT Ultima HDP reactor also provides enhanced safety features, thanks to its intelligent safety systems. These features include automatic shut-off in the case of gas leaks, sudden changes in pressure or temperature, or power surges. The asset also alerts the operator in the event of an emergency, allowing them to take the necessary steps to ensure process safety. In summary, APPLIED MATERIALS Ultima HDP reactor is a state-of-the-art process tool that enables the fabrication of advanced microelectronic circuits and devices. The combination of its high-density plasma source and cascaded plasma discharge chamber, coupled with the partnership with Plasma-Therm, makes Ultima HDP the most advanced processing tool in its class. Its comprehensive suite of diagnostics and real-time monitoring model enables precise control of process parameters and improved process repeatability. It also provides enhanced safety features to ensure process safety in the case of an emergency.