Used AMAT / APPLIED MATERIALS Ultima #293758482 for sale

ID: 293758482
CVD System.
AMAT / APPLIED MATERIALS Ultima reactor is a high-performance plasma reactor tool designed to enable the production of advanced integrated circuits. The reactor is capable of delivering high-quality etch, deposition, cleaning, and prime applications while ensuring process consistency and yield. AMAT Ultima reactor offers a fully automated and controlled processing environment with advanced process controls. This allows for precise ion densities, temperatures, and self-optimizing plasma processing. The advanced process controls enable the tool to guarantee exact results for each and every device produced. APPLIED MATERIALS Ultima reactor uses magnetron sputtering technology which allows for high deposition rates and uniformity on a variety of materials. The dense, uniform film allows for more precise convergence of the process layer and more precise patterning with reduced registration error. The uniform film also reduces the risk of process bias and increased defectivity. Ultima reactor also allows for multiple substrates to be processed in parallel, increasing throughput and throughput variability control. The Advanced Process Control (APC) enables process engineers to control and monitor etch and deposition processes. The APC allows for real-time process optimization and feedback, while simultaneously providing documentation and records of process conditions, including temperatures, pressures, and substrate material type. AMAT / APPLIED MATERIALS Ultima reactor features a vacuum chamber with an area of up to 180mmx40mm and a gas delivery equipment that includes a mass flow controller (MFC) and gas exhaust system. The vacuum chamber is designed to ensure precise control of the process gases. In addition, AMAT Ultima reactor offers sophisticated temperature and power control, giving precise control of the substrate temperature. This precise temperature control is necessary for repeatable, controlled, and predictable processes that result in precise, high-yield results. APPLIED MATERIALS Ultima reactor also features an in-situ metrology unit that can measure features such as critical dimensions, nitride integrity and surface roughness. The metrology machine provides information that can be used to refine process conditions or monitor and optimize process performance, ensuring optimal yield and improved process control. Overall, Ultima reactor is an advanced, high-performance plasma reactor tool that is capable of delivering reliable, high-quality, and consistent processing results. The tool is designed to handle a variety of materials and substrate sizes and offers the latest in process control and monitoring, allowing for repeatable, controlled, and predictable processes. The processes can be optimized and control in real-time, allowing for greater yield and improved process outcomes.
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