Used AMAT / APPLIED MATERIALS Ultima #9163587 for sale
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ID: 9163587
Wafer Size: 12"
CVD System, 12"
Includes:
Main frame:
VHP
Robot
Driver
FI Unit:
(2) KAWASAKI Robots
Primary AC rack.
.
AMAT / APPLIED MATERIALS Ultima reactor is a high-performance physical vapor deposition (PVD) equipment designed for ultra-high-density film deposition applications and the production of large-area components. This reactor is suitable for large-scale production of components for infrastructure applications such as photovoltaics, telecom, LED, display and other applications. AMAT Ultima reactor is optimized for film flatness and total reflectivity uniformity at thin film thicknesses. This makes it an ideal choice for applications that require highly uniform layers of ceramics, metals, and compound materials. The reactor consists of an ultra-precise film control system, a process chamber, which in essence acts like a vacuum dome, a bottom heater assembly capable of reaching extreme temperatures, and a top-mounted annular source sputter module. The reactor also includes a rotary multi-spindle load lock that allows easy access for loading and unloading of substrates, while keeping the chamber at vacuum conditions. Its automated chip loading unit and robotic handling machine also allow for the processing of large wafers. APPLIED MATERIALS Ultima reactor features a maximum fabrication rate of 30um of thickness per hour, with sputtered deposition rates up to 180 minutes. This tool is also integrated with advanced process monitoring technologies, allowing operators to take full control of their process parameters while ensuring superior product quality. Ultima reactor's highly efficient design allows for the production of large-area components with precision and uniformity. Its advanced process control systems allow process engineers to monitor, trace, and adjust parameters as needed, resulting in an optimized process and maximum throughput. The asset's advanced vacuum and efficient gas flow systems promote a stable, clean environment for producing uniform layers of material. AMAT / APPLIED MATERIALS Ultima reactor is the ideal tool for high-volume production of precision layers of materials for photovoltaic, telecom, LED, display, and many other applications. With its optimized fabrication rates, advanced process monitoring capabilities, and uniform production of layers, AMAT Ultima reactor is an ideal choice for large-scale film deposition operations.
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