Used AMAT / APPLIED MATERIALS Wafer orienter chamber for P5000 #9269013 for sale
URL successfully copied!
Tap to zoom
ID: 9269013
Wafer Size: 8"
8"
Wafer chuck, 8"
Wafer lift, 8"
Chamber lid
Part number / Description
0010-70247 / Laser optics, Assy
0010-20339 / Orienter rotation motor, Assy
0100-20068 / PCB, CCD
0090-76058 / Wafer orienter, PCB.
AMAT P5000 Wafer Orienter Chamber is an innovative reactor that enables higher yields of advanced materials with greater precision and control. The P5000 is designed for a range of process types including deposition, etching, and cleaning of multiple wafer substrates. This machine takes advantage of the latest generation of hardware, with an automated process controller, upgraded safety system, high-precision alignments, and enhanced vacuum capabilities. The P5000 Wafer Orienter Chamber offers a uniquely large production capacity. This allows production of wafers up to 12 inches in diameter, with up to five substrates able to be handled simultaneously. Each wafer is positioned, and the exact position of the wafer can be accurately determined and adjusted using advanced digital optical subsystems. This ensures precise and repeatable alignment of the wafer during the process, which is essential for higher yield materials production. The wafer orienter can be configured to enable deposition of various advanced materials such as oxides, nitrides, thin films, and other high-performing materials. This reactor utilizes a high-sensitivity quartz crystal monitor and mass flow controller, enabling precise control over the entire deposition process. This gives operators the ability to precisely manage the distribution and temperature of delivery gases, resulting in precise deposition of materials and uniformity across the wafer. The P5000 also offers an unrivaled safety system by monitoring safety parameters such as gas and vacuum pressure, oxygen levels inside the reactor, and temperature range inside the chamber. It is also equipped with external hardware for additional protection, such as a inert gas lockout, which prevents process gases from entering the process chamber or other areas. The P5000 Wafer Orienter Chamber combines the latest in hardware technology with proven materials production techniques to provide maximum convenience and control. It is the perfect choice for those who need to process larger and smaller batches of materials efficiently and precisely.
There are no reviews yet