Used APPLIED MATERIALS Centura DXZ #114651 for sale
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ID: 114651
4 channel system, 8"
Narrow body load locks
Manual lid hoist
HP Robot
CH A, B, C, D –DxZ Silane Oxide
Direct drive throttle valve
AE RFG 2000-2V
10torr Baratron
100torr Baratron
Gases (Unit MFCs):
300cc N2O
3SLM N2O
5SLM He
3SLM CF4
150cc SiH4
5SLM N2
Seriplex Gas Control
CH E – Multi slot cool down
Bottom feed exhaust
Facilities bottom feed
OTF Centerfind
1998 vintage
As-is, where-is.
APPLIED MATERIALS Centura DXZ is a high-yield, low-cost semiconductor processing equipment designed primarily for deep sub-micron device fabrication. The system uses advanced deposition techniques to deposit, etch, and pattern layers of materials with high fidelity and repeatability. The process is driven by a unique, high-speed, front-to-back tiling technology, enabling faster deposition rates and excellent uniformity and control over feature shapes. This can enable fabricators to create semiconductor devices faster and more cost efficiently, while maintaining tight process control. As a reactor unit, Centura DXZ is designed to deposit thin layers of materials onto substrates, or 'wafers'. The machine utilizes a proprietary process chamber that enables deposition of controlled thicknesses of single layer or multiple layers, as low as 0.1 micrometers (100 nanometers) thick. The high-speed tiling technology provides exceptional substrate throughput and precise control over feature shapes. The tool has capabilities for depositing a variety of materials, including metals, dielectrics, and other semiconductor materials, providing versatile use. APPLIED MATERIALS Centura DXZ process control asset is an essential component of the model, providing powerful capabilities for controlling the reactor. This includes functions like over-pressure protection, precise material distribution, precise temperature control, and precise material build-up monitoring. This ensures a tighter process window, providing operators with greater confidence in their results. Centura DXZ equipment is a revolutionary reactor for fabricating deep sub-micron semiconductor devices. Its proprietary chambers and tiling technology enable engineers to deposit materials quickly and with excellent uniformity and repeatability, while its process control system provides tight control. With a low cost and high yield design, APPLIED MATERIALS Centura DXZ unit is an ideal choice for fabricators who require precision and versatile performance.
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