Used APPLIED MATERIALS Endura 5500 #155729 for sale

APPLIED MATERIALS Endura 5500 is a revolutionary production reactor designed to enable cost-effective deposition of advanced materials, including copper and copper alloys, through an innovative open equipment approach. This reactor is designed to deliver production-worthy results under high temperatures and aggressive process chemistries, such as plasma etch, PVD and CVD processes. Endura 5500 is an advanced whole-wafer multi-zone reactor that features a large heated chamber with temperature control of up to 500°C, with a process time of up to 90 minutes per batch of up to 60 wafers. This reactor has been designed to optimize process uniformity, with proprietary vectorization and advanced uniformity control, resulting in increased yield and product quality. APPLIED MATERIALS Endura 5500 integrates a range of deposition, etch and sputtering technologies, including Applied's unique Inline Rapid Thermal Processing (iRTP) and Global Uniformity Control (GUC) technology. This system has a wide range of automated process automation and control capabilities, allowing for modular end-to-end fabrication. Endura 5500 features both linear and circular processing chambers and is capable of delivering a wide range of wafer-by-wafer uniformity yields and process uniformities. This advanced reactor can process up to 3-inch wafers at a time, with materials deposition rates of up to 2000 angstroms/min or 2400 angstroms/min depending on its configuration. APPLIED MATERIALS Endura 5500 utilizes proprietary sextupole-powered magnetic confinement to keep process gases confined, reducing their reaction with the walls of the reactor. Endura 5500 also features a comprehensive process monitoring unit, with data logging capabilities and a single-view window into all process parameters, as well as a web-based remote support machine for ease of set-up and operation. Additionally, the integrated Endura management tool allows for full automation of a production facility. APPLIED MATERIALS Endura 5500 offers unparalleled precision and performance for copper and copper alloy depositions, as well as other advanced materials, as it has been designed to maximize production efficiency and cost-effectiveness. This innovative reactor offers a highly reliable and productive processing solution with process excellence.