Used APPLIED MATERIALS Endura 5500 #194192 for sale
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ID: 194192
Wafer Size: 6"
Vintage: 2004
6" PVD System
Chambers:
(2) standard
(1) wide body
Chamber 1 STD-Ta(CLAMP), DURA Magnet
Chamber 2 Wide-TaSi(CLAMP0, DURA Magnet
Chamber 3 STD-AlCu(CLAMP), A Magnet
Chamber A: PCⅠ(Pedestal)
Installed
2004 vintage.
APPLIED MATERIALS Endura 5500 is a high-end, state-of-the-art reactor designed for advanced semiconductor process technology. Developed by APPLIED MATERIALS, this equipment provides a platform for single wafer processing using either an inductively coupled plasma or a remote plasma for a variety of semiconductor process applications, including metal aluminum alloy, silicon oxide/nitride etch, video and dielectric deposition, and chemical-mechanical planarization. Endura 5500 reactor is designed with a number of exemplary features that make it one of the most advanced systems in the market today. It is equipped with a modular architecture and highly flexible process chamber, allowing for high-throughput processing of single wafers. Additionally, it incorporates a 6-axis robotic system housed within an automated cassette-to-cassette cell, allowing for precise wafer transfer and recipe execution. The unit is also capable of providing a wide range of process conditions through comprehensive gas and power delivery mechanisms and feedback control. In addition, APPLIED MATERIALS Endura 5500 reactor is equipped with several features that ensure high-quality, reliable process results. The machine is designed with an in-situ, all-reflective optical view port, which utilizes a high-powered microscope to inspect wafers for defects during pre- and post-process operations. It also includes a powerful wafer handling mechanism, allowing for precise control of parameters such as heating, cooling, and pressure, in order to maximize process accuracy. For maximum efficiency and ease of operation, Endura 5500 reactor includes a user-friendly Graphical User Interface (GUI). This intuitive user interface simplifies interaction with the tool, allowing operators to easily monitor, control, and optimize processes. Furthermore, the asset is designed to facilitate tool servicing, with quick-release components and access ports for easy tool maintenance. Overall, APPLIED MATERIALS Endura 5500 reactor is an indispensable model for any semiconductor lab. It integrates a range of innovative features, allowing users to obtain superior quality, reliability, and throughput. Specifically designed for process optimization, the equipment ensures precise process control, allowing engineers to reliably achieve desired process results for any semiconductor application.
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