Used APPLIED MATERIALS Endura 5500 #66676 for sale
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ID: 66676
PVD systems, 8", sputter TNAA
Mainframe
2 Phase Cryo Pumps (0190-76014)
No RGA Valves
Hoists for Buff
Ch 1 Configure
Standard Body Chamber W/O Water Cooling Jacket
13” Source Assembly for STD(0010-20059)
2 Position Gate V/V
Pneumatic Lift Assembly for 101
Heater : Standard 101 Heater, No Backside Heater Gas Lines
Motorized Heater Assembly
Chamber Interconnect PCB(STD)
Baratron Gauge/Convectron Gauge/Ion Gauge and Cables of Those
Adapter Part# : 0040-22024
Ch 2 Configure
Wide Body Chamber w/o Shutter Assembly
13” Source Assembly for WB(0010-20401): MDX-L12M
Magnet part# : 0010-20223 or 0010-20818(Uncharged Al 13” Magnet)
Source Gear Box : 7.5:1
2 Position Gate Valve
Baratron Gauge/Convectron Gauge/Ion Gauge and Cables of those
Heater : Standard 101 heater, No Backside Heater Gas lines
Pneumatic lift assembly for 101
Chamber Interconnect PCB(STD)
Ch 3 Configure
Standard Body Chamber W/O Water Cooling Jacket
13” Source Assembly for STD(0010-20059)
2 Position Gate V/V
Pneumatic Lift Assembly for 101
Heater : Standard 101 Heater, No Backside Heater Gas Lines
Motorized Heater Assembly
Chamber Interconnect PCB(STD)
Baratron Gauge/Convectron Gauge/Ion Gauge and Cables of Those
Adapter Part# : 0040-22024
Ch 4 Configure
Standard Body Chamber W/O Water Cooling Jacket
13” Source Assembly for STD(0010-20059)
2 Position Gate V/V
Pneumatic Lift Assembly for 101
Heater : Standard 101 Heater, No Backside Heater Gas Lines
Motorized Heater Assembly
Chamber Interconnect PCB(STD)
Baratron Gauge/Convectron Gauge/Ion Gauge and Cables of Those
Adapter Part# : 0040-22024
Ch C Configure
Chamber Interconnect PCB
RF Match box for 200 mm
RF Resonator
13.56 MHz Comdel Power Supply (CPS-1001S)
RFPP 400 KHz Power Supply (LF-10)
Turbo Pump/Adapter (Not Elbow Type)/Cable/Controller(NT150/360)
Ch A Configure : Passthrough
ExistWhole assembly
No Missing Parts
Ch B Configure : Cooldown
No Missing Parts
LLC A&B
Narrow Body Tilt out
CH E&F
Orient Degas Chamber
No TC Option
Degas Module Part# : 0010-20317
1995-1998 vintage.
APPLIED MATERIALS Endura 5500 is an advanced, plasma-based etching reactor designed to provide high-quality etch performance and low maintenance costs. Endura 5500 is equipped with the latest in opto-mechanical and process control advancements, and is able to deliver precision etch processing with high-speed throughput and repeatable results at ultra-low operating costs. APPLIED MATERIALS Endura 5500 utilizes a variety of advanced etching process technologies, including high-power ion milling, high-density reactive ion etching (RIE), and sputter etching. With high-power ion milling, etch processes such as micromachining and defect repair can be accurately performed, providing high-quality, repeatable results. For deep etching applications, Endura 5500 features high-density RIE which enables etching depths four times the etch depth of conventional RIE. For extremely precise etching requirements, APPLIED MATERIALS Endura 5500 includes a state-of-the-art sputter etching process, enabling precision etching of structures as small as 0.25 micrometers. Endura 5500 is also equipped with a range of process automation features designed to speed up and streamline etching routines. Process control and automation is achieved through the use of an integrated robotic arm and a range of Real Time Control (RTC) functions which give users full control over etching parameters to ensure consistent results. Additionally, APPLIED MATERIALS Endura 5500 is equipped with an integrated advanced inspection system which enables reliable testing and confirmation of wafer processes. To ensure reliability and optimize long-term process performance, Endura 5500 also includes a sophisticated predictive maintenance system which monitors the etching reactor performance parameters and reports when maintenance needs to be performed, thus helping minimize downtime and maintenance costs. Overall, APPLIED MATERIALS Endura 5500 is the perfect choice for high-precision, high-throughput etch processing. With advanced automation capabilities, high-quality process results, and cost-effective maintenance solutions, Endura 5500 is the ideal etching reactor for a wide range of applications.
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