Used ASM Epsilon 2000 #9050020 for sale

Name: ASM Epsilon 2000
Brand: ASM
SKU: 9050020
Availability: SoldOut

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

Tap to zoom

Sold

Reactors

Manufacturer

ASM

Model

Epsilon 2000

ID: 9050020

Wafer Size: 8"

EPI Reactor, 8" Model 26 Stand-alone, single wafer Reactor module: Model RP for reduced pressure processing and ATM processing Vacuum load locks (scroll pump not included) Clean-room front with color touch screen operator interface (2) independent wafer cassette load locks Right-hand maintenance access configuration Automated wafer handling section with Bernoulli wand VAT – reactor gate valve Maintenance access: 2 0port in wafer handling chamber Epitaxy process chamber, susceptor and related quartzware for 200mm wafer processing Toshiba graphite: square Observation windows on maintenance access doors in wafer handling and process chamber sections 68040-based computer Operating system and software with 4.3 Gbyte hard disk drive Multiport Injector Flange with water cooling circuit Vibration Isolation Package HCl detector: reactor module Adjustable Spot Lamps Gas control module: Orbital welded 316L stainless steel, electropolished interior surface tubing Line and component connections via metal-gasketed fittings .003 micron point-of-use filtration AERA mass flow controllers: Model 7810/7820 Gas sampling ports Gas Loops: Nitrogen (N2) purge Hydrogen (H2) carrier and purge Hydrogen chloride (HCl) wafer and chamber etch Dopant #1, diborane (B2H6) P-dopant, diluent and inject Do pant #2, phosphine (PH3) or arsine (AsH3) N-dopant, diluent and inject Low flow hydrogen chloride (HCl) Auxiliary silicon source, dichlorosilane (SiH2Cl2, gas) Auxiliary loop for TCS with MFC and Lorex Piezocon controller Advanced application valving HCl detector – gas module Precision Vent Matching Power module: Single point, 3-phase, 60 Hz, 480 VAC power input Lamp array SCR packs 110 VAC/24 VAC power distribution circuits Power and load protection devices 0 ft. (15.2m) of interconnect wiring harness for remote operation Engineering console: Color touch screen operator interface Operator key lock control Temperature control digital electronics 50 ft. (7.6m) of interconnect wiring harness for remote operation Source cabinet with mini bubbler: 10-liter mini-bubbler H2 Detector HCl detector TCS/DCS.

Read More Close

ASM Epsilon 2000 is a versatile reactor designed to meet a wide variety of needs in a wide range of applications. It is intended to be a reliable, low-maintenance and safely-operating nuclear reactor, and it is capable of producing a variety of fissile materials and isotopically-enriched fuel needed in nuclear technology. Epsilon 2000 is a sodium-cooled fast reactor. This type of reactor uses liquid sodium as its coolant, which allows it to operate at higher temperatures than other reactor types. It is constructed with a double-walled core and a reinforced steel containment vessel, which provides extra safety and protection from external sources. Additionally, ASM Epsilon 2000 utilizes various control systems in order to ensure that its core does not exceed its safety limits. Epsilon 2000 has a number of advantages when compared to other nuclear reactors. It has an 85%-efficiency rate, meaning that it is able to produce more energy with less fuel. Improved fuel economy translates into lower operating costs and less waste generated, making it a more cost-effective reactor option. Additionally, ASM Epsilon 2000's design allows for more efficient fuel utilization, meaning that it is able to convert more of the fuel into energy, rather than wasting energy through heat transfer. Epsilon 2000 also features a variety of safety features, such as an emergency core power cut-off system and an isolation zone safety system. With these features, the reactor has been designed to be able to respond to emergency situations quickly and safely. Moreover, the reactor has a system for operating with refueling and maintenance procedures, ensuring that its inner components are kept properly maintained and that the fuel is replaced regularly. ASM Epsilon 2000 is a reliable reactor that is capable of providing a reliable, efficient and cost-effective source of power for a variety of applications. Its advanced safety systems and efficient fuel utilization demonstrate its commitment to preserving the environment and well-being of its users. Epsilon 2000 is an ideal choice for nuclear power production.