Used ASM EPSILON 3200 #9198737 for sale
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ID: 9198737
Wafer Size: 12"
Vintage: 2007
Chemical vapor deposition system, 12"
Epitaxial reactor
Reduced pressure
Chamber
Gas loops:
Nitrogen (N2) purge
Hydrogen (H2) carrier and purge
Hydrogen chloride (HCl) wafer and chamber etcher
Primary silicon source, dichlorosilane (SiH2Cl2, gas)
Low flow hydrogen chloride (HCl)
Auxiliary silicon source, silane (SiH4)
Germanium source, germane (GeH4)
SMIF System:
(2) ASYST ISO Port
Handler system:
ASYST FI Robot
GENMARK X-Fer robot
Configuration:
General system:
Model: E3200 RP
Left hand
Graphite:
Xycarb
Deep grid self-centering susceptor
Reactor pump:
EBARA
Front end interface:
(2) Load ports (RF): Isoport
(2) FOUP ID Readers (RF)
Side louvered panels / Flat top (Ballroom configuration)
Light tower - 4 Position
User touch screen:
Installation:
Door mounted on wafer transfer module
Single touchscreen
Wafer handling section:
Dual 25 wafer loadlock
Vacuum load locks:
Level 2
Pumps for VLL:
Customer to supply:
EBARA
Bernoulli wand
Reactor module:
HCl Detector-reactor
TEK
Gas control module:
Gases / Range
N2 / 100slm
H2 / 30slm
Low flow HCl / 500sccm
Dopant 1: Diborane / 20/200/200 (20slm Dilution MFC to be non-multiflow)
AUX 1: DCS / 500sccm
AUX 2: GeH4 / 350sccm (1% GeH4 in H2)
AUX 3: CH6Si / 200sccm (20% CH6Si in H2)
AUX 4: SiH4 / 500sccm
AUX 5: Reserve position for future silcore loop
Teed inlet on N-Dopant circuit:
Incoming check valves: 7
UNIT / CELERITY Model 8161 (Digital)
Multi-gas, multi-flow for all flow loops except H2 main and 20slm dilution loop on dopant circuit
Precision vent matching
Mass flow verifier:
Canister: 50 Liters
HCl Detector: Gas module
Power supply:
50Hz / 480VAC
2007 vintage.
ASM EPSILON 3200 is a type of nuclear reactor. It uses a light-water reactor (LWR) equipment, making it suitable for large-scale electricity production. The main components of the reactor are the reactor core, the primary coolant system, and the fuel rods. The reactor core is made up of fuel assemblies consisting of several hundred uranium fuel rods. The core is surrounded by a stainless steel pressure vessel designed to contain all the components. The core is submerged in a pool of light water, which serves as the primary coolant. This coolant absorbs the heat produced by the reactions going on in the core and then transfers it to a secondary coolant, which then transfers it to turbine generators. In addition to the fuel rods, the core also contains moderators, which slow down the electrons released when neutrons split the uranium atoms. This slows down the nuclear reactions, making the reactor less prone to the risks associated with uncontrolled chain reactions. The density of the fuel rods can also be varied to further control the reaction rate. Security is another important aspect of EPSILON 3200. It employs multiple levels of control systems, which monitor the reactor's operation and any ancillary safety systems. These can also be utilized to shut down the reactor in the event of an emergency. Additionally, the reactor is designed to contain any radioactive waste that may be produced. The reactor is both equipped with a containment structure and is housed within a secondary containment unit. In conclusion, ASM EPSILON 3200 is a light-water reactor. It uses a stainless steel pressure vessel to contain the components of the reactor core and is surrounded by a pool of light water. Moderators and control systems are used to ensure that the chain reaction in the core is kept within safe levels, and a containment machine is in place in case of accidents. Keeping all these factors in mind, EPSILON 3200 is a safe and reliable source of power.
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