Used ASM Epsilon E2000 #9213662 for sale
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ID: 9213662
Wafer Size: 8"
EPI Reactor, 8"
Upgraded by ASM to E2000
Substrates: Si & SOI
Right hand configuration
CRT and keyboard
Dual floppy drive
Chiller: No
External gas cabinet: No
General description:
Single-wafer
High-temperature silicon for wafer preparation to low-temperature
Germanium (SiGe) for forming transistor strain layers
Includes:
Main body B
Control box
Gas cabinet
A/C Rack B
Work station
Misc B parts.
ASM Epsilon E2000 is a reactor specifically designed for applications in advanced chemistry and materials processing. It features a central chamber filled with a medium-sized high-energy electron beam source. This beam source is capable of focusing electrons in a number of ways, depending on the purpose of the experiment. Additionally, the reactor also includes one or more magnetic fields to help shape the beam, four pairs of transverse RF (Radio Frequency) coils for energy control and fine tuning, and a pair of linear RF coils for focusing and positioning of the electrons. Epsilon E2000 is a device that allows for precise control of the electron beam in various applications. This is capable of accelerating electrons up to 6.5 MeV in energy and can offer controlling the position of the beam with a precision of 100 - 500 µm. The design of ASM Epsilon E2000 is such that it allows for operation in a wide variety of environments and setups. It is modular, meaning that its components can be configured to fit the specific needs of the application. Additionally, the system is designed to handle high levels of radiation without damage to the components, and is engineered to withstand temperatures up to 150°C and low vacuum pressures, up to 6x10-6 mb. Epsilon E2000 can be used for a variety of operations, including materials processing, ion implantation, accelerator diagnostics, and nuclear material analysis. It is well suited for the study of microstructure and nanostructure of materials, characterizing the properties of surfaces that cannot be analyzed with conventional methods. Furthermore, it is used in non-destructive testing techniques, such as tomography, to produce high resolution 3D images of internal structures of components. ASM Epsilon E2000 reactor is a highly versatile, safe, and reconfigurable device. It is a reliable and accurate research tool that can be used for a variety of applications that require precise control and manipulation of beams of electrons. The system is ideal for both research and industrial applications, due to its ease of use and wide range of functions.
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