Used ASM Epsilon E3200 RP #9226508 for sale
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ID: 9226508
Wafer Size: 12"
EPI Deposition system, 12"
Left hand
Front end interface:
(2) Load ports (Isoport)
(2) FOUP ID Readers RF
Side louvered panels / Flat top
Light tower: 4 Position (STD)
Power: 480 VAC, 50 Hz.
ASM Epsilon E3200 RP is a reactor that was specifically designed for use in remote locations due to its small size and its high efficiency in operation. The reactor is a stainless steel construction with an adjustable temperature range of between -10° C to +50° C. It features advanced heat management capabilities thanks to its well-configured thermal insulation, as well as superior temperature control in its RP mode. With its large RP chamber, it can operate with various chemicals to handle large volume applications. In terms of safety, Epsilon E3200 RP has been designed with integrated safety devices like its built-in pressure relief valve, as well as its solid corrosion protection in the form of its stainless steel construction. Additionally, the reactor is equipped with a thermal setting switch that can turn off the reactor automatically at a programmed temperature for optimal safety. In terms of efficiency, the reactor is capable of achieving up to 65% energy efficiency, helping to save costs in the long run. It operates using low pressure gas, making it ideal for any system operating in a limited space, such as offshore applications. In addition, its two spiral wound heating elements and insulated components allows for better thermal efficiency and optimum performance. The reactor is also equipped with a unique self-regulating valve so that the process can be automatically regulated without any manual intervention. In addition, ASM Epsilon E3200 RP is also equipped with a wide range of operating modes and features, such as automatic pressure adjustment and automatic temperature control. This allows operators to set the reactor into certain operations modes such as lower, medium, and higher heat settings depending on the process they want to achieve. Overall, Epsilon E3200 RP is a high-performance reactor specifically designed for remote locations. It has a built-in safety mechanism, outstanding energy efficiency rates, and excellent thermal management capabilities, making it the ideal solution for any application requiring a compact and efficient reactor in a limited space.
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