Used ASM Epsilon E3200 #9196380 for sale

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Manufacturer
ASM
Model
Epsilon E3200
ID: 9196380
Wafer Size: 12"
Vintage: 2007
Chemical vapor deposition system, 12" Epitaxial reactor Reduced pressure Chamber Gas loops: Nitrogen (N2) purge Hydrogen (H2) carrier and purge Hydrogen chloride (HCl) wafer and chamber etcher Primary silicon source, dichlorosilane (SiH2Cl2, gas) Low flow hydrogen chloride (HCl) Auxiliary silicon source, silane (SiH4) Germanium source, germane (GeH4) SMIF System: ASYST Integrated SMIF Handler system: ASYST FI Robot GENMARK X-Fer robot Configuration: General system: Model: E3200 RP Right hand Graphite: Xycarb Deep grid self-centering susceptor Reactor pump: BUSCH DS2000 supply Front end interface: (2) Load ports (RF): Isoport (2) FOUP ID Readers (RF) Side louvered panels / Flat top (Ballroom configuration) User touch screen: Installation: Door mounted on wafer transfer module Wafer handling section: Dual 25 wafer loadlock Vacuum load locks: Level 2 Pumps for VLL: Customer to supply: (2) BUSCH BC100 Bernoulli wand Reactor module: HCl Detector-reactor TEK Gas control module: Gases / Range N2 / 100slm H2 / 30slm Low flow HCl / 500sccm Dopant 1: Diborane / 20/200/200 Dopant 2: A5H3/PH3 / 20/200/200 AUX 1: DCS / 500sccm AUX 2 (Reserve position for future silcore loop) AUX 3: SiH4 / 500sccm AUX 4: GeH4 / 50sccm (10% GeH4 in H2 with multi gas, multi-flow MFC) Teed inlet on N-Dopant circuit: Pneumatic control UNIT / CELERITY Model 8161 (Digital) UNIT / CELERITY Model 8161 (Digital) Multi-gas, multi-flow for GeH4 Precision vent matching Mass flow verifier: Canister: 50 Liters HCl Detector: Gas module Power supply: 50Hz / 480VAC 2007 vintage.
ASM Epsilon E3200 is a power generating reactor designed by ASM Nuclear Technologies. It is a small modular reactor (SMR) of the next generation of reactors, designed to provide a safe, efficient, and cost-effective solution to potential energy needs. Epsilon E3200 has an electrical power range of 200 MW, and utilizes integral pressurized water reactor (PWR) primary cooling technology. The reactor core is surrounded by high-density boron-steel plate walls, with the interior housing a regulated core equipment containing low-lead spacer grids, control rods, fuel channels, and calandria tubes. This ensures efficient and safe operation of the reactor. The reactor is also equipped with a passive heat removal system, which allows for the reactor to cool in the event of a loss of all electrical power. This unit is based on gravity and natural circulation principles, and uses no power. This cutting-edge technology makes ASM Epsilon E3200 one of the safest reactors currently available on the market. Epsilon E3200 also includes a digital instrumentation and control machine, which allows for the real-time monitoring of reactor parameters. This helps to keep the reactor at peak efficiency, and also provides early warning of any potential problems or issues. ASM Epsilon E3200 has passed extensive safety reviews by the Nuclear Regulatory Commission, and is certified for advanced safety features. With its advanced technology and safety features, Epsilon E3200 is ideal for use in remote locations, where access to traditional power sources may be limited or nonexistent. This makes ASM Epsilon E3200 a viable option for those seeking an efficient and safe source of power.
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