Used ASM Epsilon E3200 #9196380 for sale
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ID: 9196380
Wafer Size: 12"
Vintage: 2007
Chemical vapor deposition system, 12"
Epitaxial reactor
Reduced pressure
Chamber
Gas loops:
Nitrogen (N2) purge
Hydrogen (H2) carrier and purge
Hydrogen chloride (HCl) wafer and chamber etcher
Primary silicon source, dichlorosilane (SiH2Cl2, gas)
Low flow hydrogen chloride (HCl)
Auxiliary silicon source, silane (SiH4)
Germanium source, germane (GeH4)
SMIF System:
ASYST Integrated SMIF
Handler system:
ASYST FI Robot
GENMARK X-Fer robot
Configuration:
General system:
Model: E3200 RP
Right hand
Graphite:
Xycarb
Deep grid self-centering susceptor
Reactor pump:
BUSCH DS2000 supply
Front end interface:
(2) Load ports (RF): Isoport
(2) FOUP ID Readers (RF)
Side louvered panels / Flat top (Ballroom configuration)
User touch screen:
Installation:
Door mounted on wafer transfer module
Wafer handling section:
Dual 25 wafer loadlock
Vacuum load locks:
Level 2
Pumps for VLL:
Customer to supply:
(2) BUSCH BC100
Bernoulli wand
Reactor module:
HCl Detector-reactor
TEK
Gas control module:
Gases / Range
N2 / 100slm
H2 / 30slm
Low flow HCl / 500sccm
Dopant 1: Diborane / 20/200/200
Dopant 2: A5H3/PH3 / 20/200/200
AUX 1: DCS / 500sccm
AUX 2 (Reserve position for future silcore loop)
AUX 3: SiH4 / 500sccm
AUX 4: GeH4 / 50sccm (10% GeH4 in H2 with multi gas, multi-flow MFC)
Teed inlet on N-Dopant circuit:
Pneumatic control
UNIT / CELERITY Model 8161 (Digital)
UNIT / CELERITY Model 8161 (Digital)
Multi-gas, multi-flow for GeH4
Precision vent matching
Mass flow verifier:
Canister: 50 Liters
HCl Detector: Gas module
Power supply:
50Hz / 480VAC
2007 vintage.
ASM Epsilon E3200 is a power generating reactor designed by ASM Nuclear Technologies. It is a small modular reactor (SMR) of the next generation of reactors, designed to provide a safe, efficient, and cost-effective solution to potential energy needs. Epsilon E3200 has an electrical power range of 200 MW, and utilizes integral pressurized water reactor (PWR) primary cooling technology. The reactor core is surrounded by high-density boron-steel plate walls, with the interior housing a regulated core equipment containing low-lead spacer grids, control rods, fuel channels, and calandria tubes. This ensures efficient and safe operation of the reactor. The reactor is also equipped with a passive heat removal system, which allows for the reactor to cool in the event of a loss of all electrical power. This unit is based on gravity and natural circulation principles, and uses no power. This cutting-edge technology makes ASM Epsilon E3200 one of the safest reactors currently available on the market. Epsilon E3200 also includes a digital instrumentation and control machine, which allows for the real-time monitoring of reactor parameters. This helps to keep the reactor at peak efficiency, and also provides early warning of any potential problems or issues. ASM Epsilon E3200 has passed extensive safety reviews by the Nuclear Regulatory Commission, and is certified for advanced safety features. With its advanced technology and safety features, Epsilon E3200 is ideal for use in remote locations, where access to traditional power sources may be limited or nonexistent. This makes ASM Epsilon E3200 a viable option for those seeking an efficient and safe source of power.
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