Used ASM F120 #9384773 for sale
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ID: 9384773
Thermal ALD system
Upto 400°C
(4) Reactors, 4" Single wafers
Deposition:
Al2O3: TMA and H20
TiN/TiO: TiCl and N2/O2
Uniformity: 80 - 90 mm.
ASM F120 reactor is a type of particle-bed reactor that is used for various surface modification processes. This reactor utilizes a continuous-flow microwave plasma process, which involves a combination of a microwave plasma field and a rotating particle bed. This reactor provides a number of unique benefits when compared to conventional methods of surface modification, such as chemical vapor deposition (CVD) and flame pyrolysis, and is ideal for applications such as surface oxidation and coating, surface passivation, surface stabilization, and boron nitride doping. ASM F 120 reactor consists of three primary components - the microwave plasma generator, the rotating particle bed, and the process chamber. The plasma generator utilizes a magnetron tube to generate a hot microwave plasma field that is injected into the reactor chamber. The rotating particle bed is used to transport the particles within the plasma field, resulting in a greater efficiency and uniformity of the surface modification process. Looking into the process chamber, F120 reactor contains a quartz tube that has a closed bottom end, an adjustable nozzle, and four ports for temperature gauges, gas inlets, RF power connections, and other feed materials. The chamber also has a series of concentric quartz rings and a preheater. The rings create a radial pressure gradient and the preheater is used to preheat the process chamber before the microwave transfer of energy to the particles. The characteristics of F 120 reactor can be fine-tuned through the use of various parameters, such as temperature, pressure, gas flow rate, and RF power. With a temperature range of up to 2000 C, this reactor is capable of operating under extreme conditions and providing a higher level of uniformity and performance. This reactor is also capable of processing various materials, including metals, plastics, and ceramic materials. In conclusion, ASM F120 reactor is a versatile and efficient particle-bed reactor that is used for a variety of purposes and materials. This reactor utilizes a microwave plasma process to provide uniform and effective surface modification and offers a number of benefits when compared to conventional methods. With its ability to operate under extreme conditions and its capacity to process various materials, ASM F 120 reactor is a popular choice among users in the fields of surface engineering and boron nitride doping.
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