Used ASM Polygon 8300 #9004107 for sale
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ID: 9004107
Wafer Size: 12"
Vintage: 2008
EPI reactor, 12"
ATM front-end and dual FOUP loaders
Pulsar 3000G ALCVD high-k process module
Low profile vessel (LPV) configuration with one LPV vessel per chamber
(8) Liquid level sense for Pulsar (ea. source)
GEM300 host interface software
Increased recipe volume software capability
Multi chamber sequence software capability
Pulse count software upgrade
Interface A software capability (per tool price)
Green to green bundle
Wafer present at gate
Pulsar chamber kit with susceptor
Additional spares kit
Options:
Pulsar chamber kit with susceptor
LPV vessels
Hi-k pump line kit
Ran less than 100 wafers
2008 vintage.
ASM Polygon 8300 Reactor is a firm-mounted, multi-purpose, high-pressure gas suspension reactor designed for the action of polymeric building blocks for the production of polymers and for reaction engineering experiments. The reactor is equipped with a mechanical stirrer and a gas injection equipment based on a modified fluidized bed principle. The reactor consists of a cylindrical stainless steel pressure vessel with two flat stainless steel end flanges. The pressure vessel provides a total internal volume of 8 liters, with a maximum operating pressure of 8 bar(g) at up to 225°C. A high-performance paddle and a gas-lift system with a gas bubble-lift device allows for high energy input and mixing rates, enabling faster reaction rates and higher reaction selectivities. Polygon 8300 is equipped with an open gas injection unit. This machine consists of a polygon-shaped 'gas bubble-lift' injector, located at the bottom of the pressure vessel and an outlet pipe leading to the top of the vessel, allowing the inclusion of gases in the reactor without any large pressure losses. The reactor is also designed to provide a safe working environment, with all instrumentation, valves, pumps and electrical components integrated into the vessel itself. The pressure vessel and its end flanges are equipped with a standard thermowells for temperature and pressure sensors, as well as safety pressure valves for backup safety. An independent pressure gauge indicates the tool pressure inside the vessel. Furthermore, ASM Polygon 8300 Reactor is designed for easy operation and maximum efficiency. All equipment is designed to minimize heat and pressure losses and to facilitate rapid start up times. In addition, the reactor is also designed for automated operation and process control. Polygon 8300 is suitable for operation under conditions of an active, continuous flow. The feeding asset consists of a vertically mounted peristaltic pump that can deliver both the reagent and the reaction product. In summary, ASM Polygon 8300 Reactor is a highly efficient, multi-purpose reactor suitable for polymer synthesis, reaction engineering experiments and other applications. Its open gas injection model provides a high energy input and mixing rates, while the pressure vessel and its integrated safety equipment ensures safety during operation. Its automated operation and process control capabilities guarantee maximum efficiency.
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