Used AVIZA Pantheon 304 #293800011 for sale
URL successfully copied!
Tap to zoom
ID: 293800011
Wafer Size: 4"-12"
Atomic Layer Deposition (ALD) system, 4"-12"
Substrate temperature: 400°C
Materials:
Al2O3
HfO2.
AVIZA Pantheon 304 is a high-performance, high-temperature chemical vapor deposition (CVD) reactor designed for the growth of advanced thin films and coatings in research and production environments. This cutting-edge equipment offers precise control over deposition parameters, enabling reliable and repeatable processes for a wide range of applications in the semiconductor, optics, and materials science industries. Pantheon 304 reactor is characterized by its robust construction and advanced design features that enhance process flexibility and scalability. The reactor chamber is made of high-quality stainless steel to withstand high temperatures and corrosive gases, ensuring long-term reliability and performance. The system is equipped with a multi-zone temperature control unit that allows for customizable thermal profiles across the substrate surface, promoting uniform film growth and precise control over film properties. One of the key features of AVIZA Pantheon 304 reactor is its advanced gas delivery machine, which enables the precise control of reactant gases and their flow rates during the deposition process. The tool is equipped with mass flow controllers and pressure regulators that provide accurate and stable gas flow control, ensuring reproducible film properties and high-quality results. Additionally, the reactor can accommodate a wide range of precursor gases and process parameters, making it suitable for both research and production-scale operations. Pantheon 304 reactor also offers a comprehensive set of safety features to ensure operator protection and asset integrity during operation. The model is equipped with emergency shutdown capabilities, gas leak detection sensors, and interlocks that prevent unsafe operating conditions, promoting a safe and controlled environment for thin film growth processes. The reactor chamber is designed for easy maintenance and cleaning, with quick access doors and removable components that facilitate regular equipment upkeep and minimize downtime. In terms of performance, AVIZA Pantheon 304 reactor delivers high-quality thin films with excellent uniformity, adhesion, and purity. The system is capable of depositing a wide range of materials, including silicon, carbon, oxides, nitrides, and metals, with precise control over film thickness and composition. The reactor can achieve film growth temperatures up to 1000°C, enabling the deposition of crystalline and polycrystalline films with tailored microstructures and properties. Overall, Pantheon 304 reactor is a state-of-the-art CVD unit that offers unmatched capabilities for thin film deposition in research and production applications. With its advanced design features, precise control over deposition parameters, and robust construction, this reactor is a versatile tool for the development of advanced materials and coatings in industries such as semiconductor technology, optics, and surface engineering.
There are no reviews yet