Used BROOKS AUTOMATION Backbone-VTS #293639202 for sale

BROOKS AUTOMATION Backbone-VTS
ID: 293639202
Wafer Size: 12"
CVD System, 12".
BROOKS AUTOMATION Backbone-VTS is a reactor designed for processing a range of precursor materials in gas and liquid form. The reactor is designed to deliver high temperatures with a high level of precision, enabling the efficient production of a wide range of materials. Backbone-VTS reactor from BROOKS AUTOMATION utilizes a variety of advanced technologies to deliver an efficient equipment for use in industrial applications. The core of the system is a rotating base that is thermally controlled for heat uniformity. This base is home to a series of crucibles, each of which features a working capacity of up to 500 mL. To ensure accuracy, BROOKS AUTOMATION Backbone-VTS reactor relies on a well-protected temperature control unit. Its optimized circulation of cold and hot gas allows it to reach temperatures ranging from room temperature to up to 1,200 degrees Celsius with an precision of up to 0.2% of its maximum range. The temperatures can be changed manually or using the reactor's programmed settings. Using the programming functions, the operator can preset up to 10 temperature curves for the reactor, allowing for efficient and reliable operation in a wide range of process parameters. Backbone-VTS also features a variety of control functions and unique condition monitoring instruments that allow operators to monitor the entire reaction process. This includes plasma emission monitoring, heat balance temperature control, and contact thermocouple or thermopile temperature control. At the same time, additional process control parameters such as vacuum pressure, gas flow, and stirring rate can all be adjusted or monitored through the machine's user-friendly interface. Overall, BROOKS AUTOMATION Backbone-VTS reactor is an efficient and reliable tool for various industrial applications. With its advanced temperature control asset, range of monitoring functions, and user-friendly interface, it provides a quick and easy solution for a wide range of precursor materials.
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