Used BROOKS AUTOMATION Backbone-VTS #9259772 for sale

BROOKS AUTOMATION Backbone-VTS
ID: 9259772
Wafer Size: 12"
CVD System, 12".
BROOKS AUTOMATION Backbone-VTS is an advanced reactor for use in a variety of research and manufacturing applications. It consists of a vacuum chamber with a proprietary modular control bypass architecture and low-pressure and high-pressure valves. Designed to optimize process control and reactor performance, the equipment is ideal for neutralization, hydrogenation and electrode fabrication. Backbone-VTS can support reactions including CVD, PE, POV, and CPC. With a minimum pressure of 1 mbar, the reactor is able to reproduce obtained process and material properties accurately and reliably. Its efficient and robust design, able to accommodate various types of temperature control system and pressure sensors, provides the necessary flexibility to tailor processes for particular requirements. The reactor also features multiple independently operated showerhead assemblies, each equipped with a separate ablation chamber and an integrated power supply. This allows for precise control of the process time, temperature, and pressure parameters. Additionally, advanced durability features are incorporated into the design, enabling reliable and consistent temperature uniformity throughout the reactor chamber. This unit offers extremely efficient vacuum control. Its built-in low-pressure control enables the user to control the internal pressure, eliminating sudden pressure drops due to a process fault and resulting in superior reproducibility. Also, an integrated cold and/or hot water circulation machine ensures a uniform temperature profile throughout the reaction chamber. BROOKS AUTOMATION Backbone-VTS also integrates additional user-friendly features such as a ceramic-tipped quartz crystal sensor, a peristaltic pump, a digital readout (DRO) tool, and process fault and process tolerance processes. A wide range of accessories, such as a glovebox and additional sensors, can be integrated into the design, allowing for multiple-reactor processing configurations. All the aforesaid features are included in Backbone-VTS, the cutting-edge reactor designed to meet the highest standards of quality and performance. Easy to install and operate, this powerful and efficient asset is an ideal choice for all research and manufacturing applications.
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