Used CAMBRIDGE NANOTECH / VEECO Savannah #293590453 for sale

CAMBRIDGE NANOTECH / VEECO Savannah is a robust, high speed reactor designed to process compound semiconductors at a variety of thicknesses and sizes. This reactor is a tool of choice for many universities and industrial research and development laboratories. VEECO Savannah offers a fully automated process with a self-calibration function that eliminates the need for continuous manual intervention. It can be used for a variety of materials synthesis, fabrication, and modification processes, such as doping, epitaxial deposition, and etching. The reactor is built with four independent gas channels and has a capacity of up to nine wafers. Each wafer is processed consecutively by the robot arm, allowing the automated switching of process gases and sample materials. This enables precise factors, such as growth rate and temperature, to be programmed and accurately maintained. CAMBRIDGE NANOTECH Savannah features a low-pressure process, which is necessary for the most advanced epitaxial deposition processes. It has a temperature range of 100°C-800°C and can be used with either DC or RF power sources, making it suitable for a wide range of applications. In order to ensure precise growth control, Savannah comes complete with an end-of-run detector, a diagnostic equipment and closed-loop temperature control. Additionally, it features a convenient wafer transfer system, an integrated metrology unit, and an anti-contamination machine that prevents particle contamination throughout the run. CAMBRIDGE NANOTECH / VEECO Savannah is a highly efficient, user-friendly reactor specifically designed for the deposition of compound semiconductor materials and other processes. With its wide range of process parameters and precise growth control, VEECO Savannah is an ideal tool for semiconductor researchers, providing the perfect platform for exploring and developing new processes.