Used CANON / ANELVA COSMOS I-1201 #293642035 for sale

ID: 293642035
PVD System.
CANON / ANELVA COSMOS I-1201 is a high-performance ion-nitride co-implantation sputtering (INCS) tool designed to produce superior quality deposits for a wide range of applications such as advanced semiconductor devices and MEMS.It features a fast recharging planar magnetron sputter equipment, perfect for high-volume production, with a conversion rate of 0.5-5 cm/min depending on film type.The aiming system is optimized to ensure a uniform and consistent discharge throughout the entire substrate area. The temperature of the chamber is adjustable from 30-250°C, which is beneficial for controlling the refractive index and other optical properties.A Diamond-Mesa coil configuration is also incorporated to produce fine line and space patterning with a maximum trace width down to 0.15 μm. In addition, an annealing unit allows for post-processing with excellent controllability and repeatability.Furthermore, CANON COSMOS I-1201 is equipped with an advanced GAS ESCA machine that gives high quality data for controlling the process parameters such as pressure, temperature and time.With its simple and reliable operation, ANELVA COSMOS I-1201 is widely used in microelectronics and optoelectronics industries. Its precise control tool allows for more precise processes, yielding higher yields with improved device characteristics.The asset can also be used for other applications such as solar cell and display production.In conclusion, COSMOS I-1201 is an ideal tool for advanced semiconductor device fabrication. Its advanced features and precise control model make it an ideal choice for those interested in producing superior quality deposits for precise applications.
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