Used CANON / ANELVA COSMOS I-1201 #293649672 for sale

CANON / ANELVA COSMOS I-1201
ID: 293649672
Wafer Size: 12"
Vintage: 2002
PVD System, 12" For solder bump CANON ANELVA Cosmos 300 PVD System (2) CANON ANELVA Unit-875CA Cryopump compressors System rack LCD Monitor rack Controller rack AC Power rack Chiller DC Rack RF Rack Cryo He hose Process chambers: Chamber-A (SLA-ICP) Chamber-B, (3) Cooling and gate bulbs Chamber-C Chamber-D (Process: Cu) Chamber-E (Process: Ti) Chamber-F (Heat) Dry pump racks: EBARA AA10N Dry pump (upper stage) EBARA AA10N Dry pump (lower stage) Chambers: Degas SLA-ICP Collimated CO (2) STD-PVD 1022-41205C Channel relay box 1022-33862C Channel relay box 1022-39070C Channel relay box (19) OMRON EE-SPX613 Liquid level sensors ULVAC Qulee CGM-052 Gas analyzer DENKI KOGYO STC-1S Matching control unit DENKI KOGYO ST-1S Matching network SMT1000J APC Smart-UPS 1000 LCD, 100 V SUA1000J APC Smart-UPS 1000 VA USB, 100 V ULVAC WPB-10-034 Pirani vacuum gauge OMRON EE-SX674 Photo micro sensor COPAL ELECTRONICS PG-35-102R-NVC Pressure gauge Main breaker: 175/225 A Interrupt current:10 A Main UPS power supply Power supply: 200 VAC, 50/60 Hz, 3-Phase, 3-wire (Ground) 2002 vintage.
CANON / ANELVA Cosmos I-1201 is a vacuum arc reactor (VAR) used in industrial sputtering processes. It is a compact, completely sealed, and self-contained device used to control the deposition rate of reactive and non-reactive metallic, dielectric, and ceramic coatings on various industrial materials. CANON Cosmos I-1201 is powered by an arc formed between an anode and a cathode when a vacuum-sealed chamber is filled with a low-pressure mixture of argon and oxygen. The arc is generated by electrical current, which flows from the negatively charged cathode to the positively charged anode. This arc creates a plasma field, allowing reactive and non-reactive material to be evaporated from a heated target, then deposited onto a substrate to form a desired industrial coating. ANELVA Cosmos I-1201 is equipped with a media phase generator that enables operation in either reactive sputtering or non-reactive (magnetron) sputtering mode. When operated in sputtering mode, Cosmos I-1201 uses magnetron technology to create highly uniform coatings while consuming less power than conventional evaporation systems. The magnetron serves as the central component in the chamber, and its design greatly influences the performance and uniformity of the sputtered coating. The enclosed electron cyclotron resonance (ECR) system delivers higher substrate surface temperatures, substantially reducing eroded target material by-products. The scope of CANON / ANELVA Cosmos I-1201's vacuum system is vast and provides for operation at pressures ranging from below 10-4 Pa to above 10-2 Pa. Two distinctive features of the vacuum chamber are the trilock seals found between the chambers and the swivel base that provides for quick and easy maintenance and alignment. Depending on the type of film deposition, CANON Cosmos I-1201 can be equipped with two or four process chambers for multi-chamber operation. The anode cooling system is based on water-cooled electrodes and a water-cooled chamber and provides efficient heat removal during operation. The patented anode cooling and oil cooling systems prevents thermal damage to the anode and works to maintain an even and steady temperature throughout the targeted substrate. ANELVA Cosmos I-1201 employs advanced technologies to ensure accurate, repeatable processes and safe operation. The latest software, combined with the multi-use architecture, allows the user to completely monitor, control, and adjust the many parameters of the deposition process. Additionally, the integrated in-situ diagnostics, when enabled, gleans information about the plasma parameters, including the current and average beam power, heat load, and target current and voltage. Overall, Cosmos I-1201 is a reliable and efficient reactor device that facilitates numerous industrial sputtering processes. It is composed of advanced engineering solutions and cutting-edge technology that ensures accuracy, versaality, and safe operation.
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