Used CANON / ANELVA COSMOS I-1201 #9377264 for sale
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CANON / ANELVA COSMOS I-1201 is a highly efficient, compact, and powerful etching and deposition reactor. It is especially suited for etching and deposition of metals, semiconductors, compounds, and dielectrics. It is capable of delivering up to 500 W of power at a frequency of 1-30 MHz and is suitable for a variety of applications, such as microfabrication and thin film deposition. It is designed to be compatible with most common equipment and materials, making it an ideal choice for research laboratories and industrial users. CANON COSMOS I-1201 has an integrated power supply and two separate chambers. The first chamber is an etch chamber where the process gas is introduced and is controlled by a combination of a gas panel, valve, and a chamber pressure gauge. The chamber is designed for optimal plasma uniformity and is easily monitored and adjusted to ensure that the desired results are obtained. The second chamber is a deposition chamber and is designed to provide uniform film-like properties, such as deposition speed, uniformity, and accuracy. It can accommodate materials of any size and thickness, and can be combined with multiple process gases for different applications. An additional feature of ANELVA COSMOS I-1201 is the E-gun electron gun, which provides direct electron beam etching and deposition capabilities. The gun is equipped with an automatic RF gun power source that allows for reliable operation and fast, precise deposition and etching. The RF power is adjustable over a wide range to allow for substrate heating and annealing. To improve the accuracy of the process, the E-gun electrons can be focused and collimated using an independently adjustable focusing grid. COSMOS I-1201 is also equipped with an auto-tuner for automatically setting the parameters of the RF generator. This allows the user to control the parameters of the plasma to match the desired conditions and is especially useful for high throughput and repeatability. Finally, CANON / ANELVA COSMOS I-1201 has a built-in safety system and is designed for OSHA compliance. It includes numerous safety features, such as ionization alarms, overheat protection, and an emergency shutoff switch. It also has a low-emission filtration system to ensure healthy working conditions in the operating room. A clear view window allows the user to keep an eye on the process at all times. In summary, CANON COSMOS I-1201 is a highly efficient, compact, and powerful deposition and etching reactor. It is capable of delivering high levels of power with precise control and a wide range of process gases, and is designed for safe and reliable operation. It is ideal for research laboratories and industrial users and is certain to improve the efficiency and accuracy of many processes.
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