Used CANON / ANELVA FC 7100 #9400031 for sale

CANON / ANELVA FC 7100 is a high-performance reactor designed for semiconductor fabrication. It utilises a unique cylindrical with-flow design for a much lower cost and smaller footprint when compared with traditional reactors. This reactor employs a heated diamond chuck to secure wafers, providing a stable and consistent planar surface for processing. CANON FC 7100 is especially suitable for processing 200mm (8 inch) and 300mm (12 inch) wafers, featuring a specialised planar-wave torque motor drive mechanism for reliable and precise patterning. It utilises integrated scanning aligners to verify accuracy during alignment and patterning processes. These processes can occur at a high temperature up to 900℃. In addition, this reactor features a large quartz viewing port to inspect wafer processing during microfabrication. The viewing window is also featured with an anti-reflective coat and is connected through an isolated ground line, providing a comprehensive protection against electrical noise when moving the wafers. ANELVA FC7100 reactor is designed with a user-friendly interface, allowing operators to easily control or monitor the processing conditions with up to 16 adjustable parameters. It also includes an in-built hot plate heater to ensure accurate temperature control during etching, deposition and cleaning processes. Multiple wafer holders can be installed in CANON FC7100 based on the requirements of the microfabrication process. For instance, for silicon wafer application, the holders can be fitted with a silicon carbide plate as a base to improve yield and offer a better surface finish. Furthermore, CANON / ANELVA FC7100 supports multiple systems for wafer transfer, including a loader and an automated unloader. The compatible systems can be connected to the main console for easy monitoring and reloading of wafers in and out of the reactor. In conclusion, FC 7100 provides an efficient and flexible solution for semiconductor fabrication. Its solid and user-friendly design and advanced features, including the integrated aligners, hot plate heater and enhanced viewing window, make it a suitable choice for both small and large production requirements.