Used CANON / ANELVA I-1201 CX #9150529 for sale

CANON / ANELVA I-1201 CX is a multi-functional reactor designed for various industrial applications, such as sputter etching, semiconductor processing, and other surface treatment operations. It is a medium- to large-scale reactor with a stainless steel cylindrical body and is provided with a conical bottom and a sloping roof, which gives the reactor a high degree of stability and protections against turbulence. It also offers excellent uniformity of the plasma field ensuring uniform etching across the entire surface. CANON I-1201 CX is usually used in an ultra-high vacuum environment, but can also be operated in a low vacuum setting as well. It has a pathed 5.5 kW RF power supply with advanced process control capabilities to adjust the power according to the process requirements. It also comes with a 5.5 kW DC bias supply that helps to decrease the deposition rate. Other features of ANELVA I-1201 CX include a quartz window, a plasma viewing port, and a shutter-controlled process gas inlet, providing excellent process control and stability for repeated and consistent surface treatment performance. It also has an anode shield that protects the upper electrode from the plasma and allows generous spacing from the lower electrode for improved process control. I-1201 CX features an advanced power/gas control system, allowing the operator to precisely control the gas/RF power ratio to optimize process results. It includes advanced diagnostics with evolutionary features such as fault detection, process monitoring, safety overload, and other related features. The advanced diagnostics also allow the operator to optimize the process parameters for higher efficiency and improved product quality. CANON / ANELVA I-1201 CX is a versatile, robust, and reliable reactor designed to ensure consistent surface treatment operations, even in the most demanding industrial applications. Its durability and flexibility make it the ideal choice for medium- to large-scale industrial processing operations. Its advanced technology and safety features make it a reliable and economical solution for various surface treatments.