Used CSD EPITAXY EpiPro 5000 #293771200 for sale

Manufacturer
CSD EPITAXY
Model
EpiPro 5000
ID: 293771200
Vintage: 2008
EPI Reactor (2) Susceptors, 6" PILLAR RF Generator, 250 kW PILLAR Heat exchanger UPS NORCIMBUS TCS Minibubbler Gases: HCL, H2 N2 Purge Gases dopant 1: PH3 / H2 Mix Gases dopant 2: B2H6 /H2 Mix Aux dopant: PH3 / H2 Mix Belljar station 2008 vintage.
CSD EPITAXY EpiPro 5000 is a state-of-the-art epitaxy reactor specifically designed for advanced optoelectronic device fabrication. Its unique modular design allows for easy installation and flexible configurations to meet various technological needs. The reactor has been specifically engineered to enable user-friendly operation, while optimizing for maximum performance. The epitaxy reactor uses a specially designed closed loop solution with multiple gas flows, allowing the process chamber to be held at an optimal environment. The precision temperature linearization is done in a three-zone design, allowing precise control over dopant fluxing performance. The reactor has an automatic doping flux control, and a maximum temperature of 1250°C. The process chamber also has a removable liner, making maintenance and cleaning easier. EpiPro 5000 is equipped with automated load lifting equipment, for safe and fast transfer of wafers into the process chamber. The numeric control system is easy to use, and allows precise settings for the gas flows, temperature, and pressure. Additionally, the advanced pulse quartz unit allows users to tune process parameters at any given time for better process stability. CSD EPITAXY EpiPro 5000 has a customizable shielding gas for protecting against FOD (foreign object debris) contamination. The constant pressure rate machine maintains a tightly sealed chamber, minimizing leak rates and optimizing the processing environment. The inner wall of the chamber is stainless steel, providing durability and excellent performance. EpiPro 5000 also features a comprehensive safety tool, ensuring safe operation at all times. The asset includes temperature and pressure sensors, as well as multiple warning and stop lights. The real-time monitoring ensures that the reactor stays in peak condition during operation. The intuitive software and control model also allows users to remotely monitor and operate CSD EPITAXY EpiPro 5000. In conclusion, EpiPro 5000 is a versatile reactor, with reliable and user-friendly features for unbeatable precision and performance. The advanced features and customizable operating parameters make this epitaxy reactor an excellent choice for advanced optoelectronic device fabrication.
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