Used INTEVAC LithoPrime #9181440 for sale
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INTEVAC LithoPrime is an advanced reactor designed to dramatically increase semiconductor fabrication efficiency by markedly reducing the amount of time required to manufacture integrated circuits. This technology has been developed with the aim of eliminating the need for multiple process steps to produce a complex device, thereby reducing the complexity of the production process and providing integrated circuit manufacturers with a fast and highly efficient solution to their needs. LithoPrime reactor employs a cylindrical design featuring an integrated expansion chamber which allows for precise control of the process environment. This is accomplished through the use of a cooled gas source and velocity control system. The reactor is equipped with an optical inspection system and advanced temperature and humidity sensors to ensure that processing parameters remain accurately controlled throughout the production process. To optimize throughput, the pressure in the reaction chamber can be precisely controlled. INTEVAC LithoPrime is designed for compatibility with a variety of deposition technologies such as chemical vapor deposition (CVD), sputtering, and reactive ion etching (RIE). This versatile processing platform is well-suited for a wide range of materials ranging from silicon-based materials and non-volatile memory to thick-film semiconductors and graphene. In addition to its unmatched processing capabilities, LithoPrime also offers highly efficient gas injection flow rates and precise temperature control. Processing time is significantly reduced due to the reactor's fast cooling system, and the heated chamber allows for the efficient use of precursor gases. The reactor also features an enlarged substrate size for larger substrate processing applications, and a layer-by-layer fabrication process which enables the efficient formation of devices with complex structures. The potential of INTEVAC LithoPrime is immense, and its use is already transforming the landscape of semiconductor production. This highly advanced reactor offers manufacturers improved yields, higher throughput, and improved process control. It is a perfect solution for manufacturers looking to enhance their production capabilities.
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