Used INTEVAC Matrix #9288407 for sale

INTEVAC Matrix is a highly efficient and cost-effective reactor specifically designed for processing of semiconductor wafers and advanced materials. It features a large substrate surface area and improved temperature uniformity for tight process reproducibility. The inert vacuum environment allows for operation at high temperatures and speeds, and as a result, the reactor is able to operate with much shorter cycle times than manual solvent-based processing systems. At its heart, Matrix is an exclusive, all-quartz dual vacuum chamber equipment. The chamber system combines an ultra-high vacuum (UHV) primary chamber and a reactive secondary chamber. This two-chamber technology allows for sophisticated control of wafer processing. The primary chamber is used for physical vapor deposition and etching, while the secondary chamber is equipped with an RF induction heating unit that can be used for thermal processing of materials such as high-k and low-k dielectrics. This dual-chamber architecture also eliminates the need for a transfer machine, thereby increasing productivity and reducing operating costs. INTEVAC Matrix is designed with safety in mind. All operating conditions and alarm records can be monitored remotely using the on-board telemetry tool. The reactor is also equipped with interlocks and self-diagnostic systems that are designed to reduce the risk of exposure to hazardous material. In terms of hardware, Matrix is equipped with features such as an in-situ endpoint monitoring asset, automated wafer monitoring, a rapid cooling model, an enhanced RF inductive heating equipment, an improved pressure control system, and a fully-integrated automated loading unit. All of these features combine to provide a reliable and user-friendly machine that simplifies process cycles and reduces total process time. INTEVAC Matrix is extremely versatile, and is compatible with a variety of advanced process recipes. It is capable of a wide range of process chemistries such as thermal oxidation, nitride deposition, sputter etching, and photolithography. Overall, Matrix is an advanced and efficient reactor that is ideal for semiconductor and other advanced material processing. Its highly efficient design makes it ideal for process reproducibility over time. INTEVAC Matrix is designed to operate safely and reliably, while providing users with a comprehensive set of features and capabilities. It is the perfect choice for laboratories and production facilities demanding outstanding process reproducibility and repeatability.