Used INTEVAC Vertex Spectra Y09 #293626646 for sale

INTEVAC Vertex Spectra Y09 is a high-power electron-beam HF-CVD (Hot Filament Chemical Vapor Deposition) reactor used in the deposition of various materials, including copper, copper alloys, and copper-cobalt alloys. The reactor utilizes two independently-and-simultaneously operational electron beam guns, combined with a novel pre-formed plasma source. These features enable the deposition of precisely engineered semiconductor films at high throughput, with a minimized deposition rate variation. The reactor offers the ultimate level of process flexibility, utilizing three independent heating sources generated in the vacuum chamber. The pre-formed plasma source provides a high-power, stable discharge that enables the deposition of uniform and precisely engineered films, with a minimized surface roughness. This also enables greater control over the growth rate and chemical potential of films, as it enables the oxidation of the substrate surface prior to the deposition process. The electron-beam guns are capable of delivering up to 37 kW of power, with a high emission current density for deposition of high aspect ratio films at high deposition rates. This results in high-profile films that are well-adhered on their underlying layers, with an extremely low-defect density. The electron-beam guns also offer a high level of controllability, giving the user full flexibility when setting the process parameters. The processable layer thicknesses range from 10 nm to 1 μm, with a minimal grain size of 1 μm. Vertex Spectra Y09's chamber dimensions are 500 mm diameter x 580 mm height and the internal volume atmosphere is a typical 5 mTorr. It is powered by a high-pressure 3400 L pump, which provides a fast vacuum pumping speed and improved chamber pressure stability. The gas inlet access is at the top of the chamber, and there is a linear tunnel wafer transfer mechanism for wafer loading. INTEVAC Vertex Spectra Y09 offers a sophisticated, user-friendly PC-based software with automated parameter settings for easy process setup. Additionally, it offers high-capacity memory for large-capacity data storage, making it easy to monitor and analyze past process performance. The device is also compliant to standard safety and environmental regulations, including CE and ISO 13485 certification. Vertex Spectra Y09 offers a flexible, high-quality deposition process for both research and manufacturing applications.