Used LAM RESEARCH Altus #293814196 for sale

LAM RESEARCH Altus is an innovatively engineered reactor designed for optimal performance in etching and deposition processes. It offers enhanced temperature and pressure control for precise material deposition and substrate uniformity. Additionally, its versatile technology platform enables the integration of advanced etch and deposition technologies to provide the best combination for a given process. Altus features a compact, fully enclosed reactor that is capable of supporting many different etching and depositing recipes. It offers turbulent-free coding, internally generated pressure, and superior etch and deposition rates due to high accuracy and repeatability. The reactor is designed with a robot-friendly, sealed cabinet and built-in process control features that make deployment and integration simple. LAM RESEARCH Altus is versatile and reliable, featuring three separate chambers that can be setup to perform dry etching, wet etching, and atomic layer deposition (ALD). The chamber design increases process flexibility, allowing for deposition of several different materials without requalification. The adaptive processing software runs both pre-defined and proprietary processing algorithms that increase productivity, reduce cycle time, and ensure improved process performance. The reactor control system features high accuracy temperature and pressure controls that are resistant to pressure surprises and provide a uniform and reproducible process. In addition, Altus utilizes a centralized process data base to manage information recorded during the operation and store recipes. The integrated software can be configured to send direct system alarms to the operator via email for any significant process events. LAM RESEARCH Altus is an advanced etch-and-deposit reactor designed to deliver the highest performance, accuracy, and reproducibility for various etching and deposition processes. The versatile process control system provides superior repeatability and eliminates the need for requalification of processes. With the integrated process data base for recipe management and the built-in process control features, Altus offers maximum efficiency with increased productivity.