Used LAM RESEARCH CONCEPT 2 Speed Sequel #9394296 for sale
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ID: 9394296
Wafer Size: 8"
Vintage: 2000
CVD System, 8"
Mainframe
Gas box: Standard with dual divert
Robot: Express dual blade
(3) Cool down slots
Dual wavelength endpoint
Sequel Chamber:
TEOS Sequel express
TEOS Sigma (6) Cabinets
(2) Speed chambers:
PFEIFFER 1600L Turbo
2000 vintage.
LAM RESEARCH CONCEPT 2 Speed Sequel (C2SS) is an advanced quasi-atmospheric Atmospheric Pressure Plasma Reactor (APP Reactor) designed for high-throughput surface treatment applications. The C2SS utilizes a unique dual-phase plasma technology process, whereby two separate processes occur simultaneously, each providing different benefits to the substrate. The C2SS reactor has a dual-phase plasma generator which allows for an optimized process control of the plasma regime. The first phase of the process is a low-pressure RF-based plasma that is utilized to generate a charged particle cloud from the process gas. This cloud is then used in the second phase, high-pressure DBD Plasma. The high-pressure phase acts to increase the density of the charged particle cloud, resulting in better contact and improved depth of treatment. The C2SS reactor has an adjustable process chamber volume from 1 to 10 liters. This allows for the processing of a broad range of substrates, from small components up to large parts with dimensions of 200mm x 300mm or larger. The reactor also features a dual in-line filter system which can remove any unwanted particles to keep the reactor running to its peak efficiency. The C2SS reactor is capable of processing a wide range of materials, including plastics, metals, ceramics, filled plastics and composites. The process can be used for surface treatment applications such as cleaning, etching, surface activation and modification. It can also be used for deposition processes, such as barrier and anti-static coatings application. The C2SS reactor can be integrated into a production line, allowing for a more cost-efficient operation. The C2SS is also a reliable and easy-to-maintain production tool. The intuitive user interface allows for a fast setup and easy troubleshooting and the built-in safety systems provide for an overall safe operation. In summary, LAM RESEARCH C2SS is a state-of-the-art atmospheric pressure plasma reactor with a unique dual-phase plasma technology process. With its wide range of process options, adjustable chamber volume and filtering system, as well as its reliability and easy maintenance, the C2SS is an ideal high-throughput solution for surface treatment and deposition applications.
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