Used LAM RESEARCH Dual Sola Excel #9379269 for sale

ID: 9379269
System.
LAM RESEARCH Dual Sola Excel is an advanced plasma reactor used for various processing applications such as etch, deposition and surface treatments. Dual Sola Excel reactor is designed to be highly efficient and cost-effective. It provides robust process chambers for fast and reliable processing of substrates. The reactor is easy to use and includes a variety of features that make it a powerful tool for process development and production processing. LAM RESEARCH Dual Sola Excel offers advanced automation options, allowing it to easily be integrated into existing systems. It features an atomix generator that enables precise gas flow control for accurate and repeatable processes. It also provides extended versatility with its dual Unterberg Power supplies, allowing for flexibility in supplying up to two process chambers. The reactor is highly configurable, and can be adapted to a wide range of applications. It is equipped with a magnetron and coil source to ensure uniform plasma distribution, and its vacuum vessel has been designed for fast pump down and superior substrate cleaning. It is also capable of combining multiple gas supply lines, making switching between processes faster and more efficient. Dual Sola Excel also has a range of safety features, such as an integrated emergency stop and automatic pressure relief valve. It is also ETL and CE certified for additional security. The reactor can be effectively interlocked with nearby safety equipment for additional protection. Overall, LAM RESEARCH Dual Sola Excel is an advanced, cost-effective, and safe plasma reactor. Its many features make it ideal for use in various processing applications, from development to production. It provides an efficient, uniform plasma distribution, and its safety features make it a reliable and secure tool for operating in any environment.
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