Used LAM RESEARCH Inova #293594356 for sale

LAM RESEARCH Inova is an advanced etching equipment used for delicate precision operations in the fabrication of silicon wafers and in microelectronic device production. It is the newest tool available and the only one with temperature control at krypton and oxygen flux rates providing unparalleled accuracy and productivity. The system utilizes ultrapure gases such as krypton, argon, and oxygen, to etch away layers of silicon with incredible exactness and control. Inova features a closed-loop ion source attached to the reactor vessel and an IOES (Ion Optical Energy Sources) which is supplemented by an auxiliary top shelf with a unique magnetic cleaning unit. This machine helps separate out nanoparticles and contaminants while maintaining a safe working environment. The IOES tool also improves the throughput of shortdepth and high-depth etch processes, ensuring both processes maintain tight control and accuracy. LAM RESEARCH Inova asset is also equipped with advanced safety mechanisms, protecting it and its components from over-pressurization, excessive material exposure, and the dangers of human error. It is designed with a special metal to metal seal and shut off valves, ensuring that the model is kept at a safe and optimal pressure. Additionally, the flanges are optimized such that air leakage is held to a minimum. Inova equipment also features Scanning Resist Etching (SRE) technology, which uses an independent resist block to accurately and safely control etch depths. This helps prevent mistakes from occurring and ensures higher yields. The SRE helps maintain a very consistent etch rate over time allowing for complete consistency, a key for device production. In addition to its accuracy and precision, LAM RESEARCH Inova is also renowned for its reliability and its low-maintenance requirements. It is highly corrosion-resistant and has a long-lasting operating life. The system does not require excessive cleaning and can be easily operated for many years without complications. Inova is an incredibly powerful and versatile etching tool. The advanced safety mechanisms, superior accuracy and precision, and the long life of the unit ensure that it is one of the best tools available in the silicon industry. It is the perfect tool for any microelectronic device production or wafer fabrication processes.