Used LAM RESEARCH Inova #293597136 for sale

LAM RESEARCH Inova is an etcher/asher equipment designed for precision plasma etching and ashing applications. It features an advanced PECVD (Plasma Enhanced Chemical Vapor Deposition) system, Dual-temperature capability and a wide range of recipes for etching or ashing. The unit offers excellent uniformity and repeatability for etching or ashing wafers. It also has an advanced optical camera machine that monitors the wafer during etching or ashing and allows for real-time feedback on etch or ashing conditions. Inova etcher/asher tool is designed to be a low-cost, high-performance asset for plasma etching and ashing. It has an Automatic Gas Density Control model that allows for precise adjustment of the plasma environment for reliable etching or ashing results. The PECVD equipment delivers uniform etching or ashing across wafers by providing a precision controlled, tightly controlled plasma environment. LAM RESEARCH Inova has dual-temperature capability that allows the user to quickly and easily select the exact temperature needed for the etching or ashing application. The Dual-temperature option allows for precise control of the etching or ashing process. Inova also features an advanced optical camera system that monitors the wafer during etching or ashing. This allows for real-time feedback on the etching or ashing conditions and provides the user with detailed information on the etch or ashing process. LAM RESEARCH Inova offers a wide range of recipes for etching or ashing that give the user a range of different etch or ashing options. It also has an automated cassette architecture that increases throughput, reduces downtime and provides improved playback of etching or ashing data. This makes it easier for the user to fine tune conditions for optimal etching or ashing results. Inova is designed for use in high-temperature and high-vacuum processes, such as plasma etching and ashing. It is designed to provide the highest levels of accuracy, repeatability, and uniformity while providing the user with a range of etching or ashing options. With its advanced features and recipes, LAM RESEARCH Inova is the ideal choice for any etching or ashing process.