Used LAM RESEARCH Inova #293597139 for sale

LAM RESEARCH Inova is a high-performance etcher / asher equipment designed for advanced semiconductor device fabrication. This state-of-the-art system was designed for high-volume batch processing of substrates and features a high-throughput, closed chamber design for production. It has built-in capability for both gas- and plasma-induced etching, making it ideal for a variety of advanced etching applications. The chamber design of Inova is composed of two vacuum chambers that are separated by a ceramic insulator and can be processed in parallel. Thisallows for optimized throughput and maximum process flexibility. An additional ion-source chamber is provided to enable plasma etching or ion-induced material removal. Through its adaptive chamber design, the unit can achieve both high level and low level etching recipes with high flexibility. The machine's hardware includes a collimated source with laser-like anisotropy, providing the highest etch rates, efficient substrate cleaning and highest quality etch profiles. This is combined with a range of integrated modules, including a reaction chamber, power supply, gas and/or plasma source, load/unload tool, temperature and pressure control, and vision systems. LAM RESEARCH Inova is designed for quick and easy substrate loading and a fully integrated security asset, including a card reader, helps to protect process recipes during production. The Software for Inova platform enables the user to control all aspects of the model from a single GUI, including load lock control, recipe development, run control, and process optimization. The software can also be used for remote monitoring, troubleshooting, performance optimization, and statistical process control. Overall, LAM RESEARCH Inova is an advanced etcher / asher equipment specifically designed for high-volume batch processing of substrates. The system's combination of hardware and software, as well as its integrated security and advanced chamber design, makes it ideal for both high level and low level etching recipes. With its versatility and robust performance, Inova is well suited for a range of advanced etching applications.