Used LAM RESEARCH / NOVELLUS CONCEPT 2 Sequel Express #293822308 for sale
URL successfully copied!
ID: 293822308
Wafer Size: 6"
Vintage: 2007
System, 6"
Dual loadlock
Double‑sided handling robot
Dual process chambers
C2‑DLCM‑S MKS ASTRON Process сhamber
SEQUEL-X M00A Process chamber
(2) MKS ASTRON AX7645PS‑01 power supplies
(2) ADVANCED ENERGY RFG 5500 RF generators
(2) ADVANCED ENERGY PDX 1400 MF generators
(2) EDWARDS EPX180L vacuum pumps
(2) EDWARDS iXH1210H vacuum pumps
Power cabinet
Control computer
Power supply: 208 V, 50/60 Hz, 3 Phase
2007 vintage.
LAM RESEARCH / NOVELLUS CONCEPT 2 Sequel Express is a cutting-edge reactor equipment developed for the semiconductor industry to meet the demanding requirements of advanced chip manufacturing processes. This innovative tool incorporates state-of-the-art technologies and features to deliver high performance, precision, and reliability in deposition and etch applications. At the core of NOVELLUS CONCEPT 2 Sequel Express reactor is its advanced vacuum chamber design, which provides a controlled environment for processing wafers with exceptional purity and uniformity. The chamber is equipped with precision gas delivery systems, temperature control mechanisms, and plasma generation capabilities to ensure the deposition and etch processes are carried out with utmost precision and efficiency. One of the key features of LAM RESEARCH CONCEPT 2 Sequel Express reactor is its versatility in handling a wide range of materials and processes. The system is capable of depositing various thin films, such as dielectrics, metals, and semiconductors, with high uniformity and conformality, making it ideal for advanced logic and memory chip fabrication. Additionally, the reactor can accommodate multiple wafer sizes and types, allowing for flexibility in production and research environments. CONCEPT 2 Sequel Express reactor is equipped with advanced process control and monitoring capabilities to ensure consistent and repeatable results. The unit utilizes advanced software algorithms to optimize process parameters in real-time, enabling precise control over film thickness, composition, and quality. Additionally, the reactor is equipped with in-situ metrology tools for monitoring film properties during deposition, providing valuable feedback for process optimization and yield enhancement. In terms of etch applications, LAM RESEARCH / NOVELLUS CONCEPT 2 Sequel Express reactor offers exceptional etch rate control, selectivity, and uniformity for critical patterning processes. The machine incorporates advanced plasma sources and gas chemistries to achieve high etch rates while maintaining critical dimension control and profile fidelity. The reactor also features advanced endpoint detection capabilities to ensure precise process termination, minimizing over-etch and improving device performance. NOVELLUS CONCEPT 2 Sequel Express reactor is designed with reliability and uptime in mind, featuring robust hardware components and advanced diagnostics systems for proactive maintenance and troubleshooting. The tool is also equipped with remote monitoring and control capabilities, allowing for real-time status updates and remote service support, minimizing downtime and maximizing productivity. Overall, LAM RESEARCH CONCEPT 2 Sequel Express reactor is a highly advanced and versatile tool for semiconductor manufacturing, offering unmatched performance, precision, and reliability for deposition and etch processes. With its cutting-edge technologies and innovative features, CONCEPT 2 Sequel Express reactor is at the forefront of enabling advanced chip fabrication for next-generation electronic devices.
There are no reviews yet