Used LAM RESEARCH / NOVELLUS CONCEPT 2 #293812831 for sale

ID: 293812831
Wafer Size: 8"
Chemical Vapor Deposition (CVD) system, 8" (2) Cool stations Transfer module robot: Mag 7 No transfer module pump No loadlock pump No process chamber pump No abatement system.
LAM RESEARCH / NOVELLUS CONCEPT 2 reactor is an advanced cluster tool designed and manufactured specifically for complex semiconductor fabrication processes. It offers a range of features that enable designers to maximize process efficiencies and reliability by taking full advantage of its powerful suite of features and fabrics. NOVELLUS CONCEPT 2 measures approximately 72" x 78" and is capable of 300 mil chip sizes which makes the tool well-suited for high density applications. The numerous substrate configurations available permit multiple processes to run on the same hardware. This equipment comes with an Advanced Process Control monitoring system which provides process stability and efficient operation. One of the benefits of LAM RESEARCH CONCEPT 2 unit is its ability to run multiple processes in one cycle. This enables the manufacturer to achieve higher levels of productivity and the ability to produce complex integrated circuit structures. The multiple process capability also allows for tighter lithography control due to the multiple process points present on each wafer. In addition, the operating environment of this machine is cleaner than other reactors due to its Gas Pre-Clean and Exhaust capabilities. This feature not only helps to maintain process integrity but also prevents cross process contamination or product contamination. The automated wafer transport/loading platform provides for greater throughput with great precision, and along with the Auto-Load enablement feature, helps to reduce processing time. Another key advantage of CONCEPT 2 is its in-situ metrology capabilities. This device is designed to include both optical and electrical inspection stations, allowing for fast, precise measurements. Its Metrology Metrics Analyzer ensures accurate defect detection and testing. LAM RESEARCH / NOVELLUS CONCEPT 2 cluster tool is a cutting edge process technology designed to help manufacturers maximize their process performance and yield. Its flexibility and advanced capabilities provide a great opportunity to increase throughput and reliability, while simultaneously reducing cost. It is a valuable asset to any semiconductor manufacturer due to its reliable process stability, comprehensive features, and clean operating environment.
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