Used LAM RESEARCH / NOVELLUS Concept 3 Vector Express #293618620 for sale
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ID: 293618620
Wafer Size: 12"
Vintage: 2007
System, 12"
Ashable hard mask
Interconnect cable: 75 ft
Atmospheric robot configuration friction end effector
Mounting for light tower audio buzzer wall/flush mount
Load lock pump:
Primary user interface flat panel right
Express
System options:
4-Colors signal tower (RYGB)
IMM Readiness over left load lock
Third FOUP
(3) FOUP RFID Readers
FA Communication interface
AHM Deposition kit
EBR Capable load lock
Pressure display package
Heated process manometer
Leak check shut off value
2007 vintage.
LAM RESEARCH / NOVELLUS Concept 3 Vector Express is a robust reactor designed for production environments. It is an advanced equipment which utilizes a sophisticated vacuum-based platform to offer an unparalleled level of performance, efficiency, and reliability. Its innovative design uses an integrated vectoring system to disperse gas and plasma over a large surface area for enhanced uniformity. The unit is fully automated and equipped with advanced diagnostics and real-time process monitoring capabilities. Its sophisticated control machine enables precise heat balancing, pressure control, and chamber cleanliness. NOVELLUS Concept 3 Vector Express is well suited for efficient thin film deposition. It includes a RF generator, pump interface, tailored process chamber exhaust, plasma diagnostics, and full automation. The striking feature of LAM RESEARCH Concept 3 Vector Express is its integrated vectoring tool. This is a set of powerful gas control staves which evenly distribute plasma and other gases across the surface of the target substrate. This enhances film uniformity, even in reactive processes. It also increases bottom-time and improves the overall process efficiency. The innovative process gas control asset offers rapid response times, precise control of gas composition, and improved model cleanliness. It ensures an optimal environmental balance throughout the chamber is maintained, resulting in improved material quality. The equipment's advanced diagnostics also enable real-time analysis of plasma parameters and substrate quality. Concept 3 Vector Express is constructed with durable materials which provide superior resistance to chemical and thermal erosion. This makes the system capable of handling a wide array of production processes. It also features integrated safety systems and built-in features to reduce maintenance costs. LAM RESEARCH / NOVELLUS Concept 3 Vector Express is a remarkable reactor designed for increased productivity and reliability. Its advanced process gas control unit, integrated vectoring machine, and sophisticated diagnostics allow for precise substrate deposition and controlled process conditions. Its durable materials and integrated safety systems ensure long-term performance and reliability. This makes it an attractive choice for production environments.
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