Used LAM RESEARCH / NOVELLUS Speed #9167146 for sale

LAM RESEARCH / NOVELLUS Speed is a revolutionary batch Reactor that offers maximum flexibility, maximized throughput, superior control and superior deposition uniformity all in an efficient and user friendly design. This Reactor marks a great advancement towards lithography integration for advanced IC design and manufacturing. This advanced reactor carries out such operations as etch, deposition and cleaning within one platform, while allowing for local customization of the capacity and complexity of production. The reactor works using a combination of multiple computer-controlled process gases that allow for the custom modification of surfaces with advanced materials such as silicon nitride, polysilicon and tungsten, along with amorphous and sputter materials. The reactor is equipped with several unique modules that facilitate a faster, more controlled, and more efficient process. The primary module is the Dual Electrode System (DES). The DES provides an extremely precise control over the process conditions, while also enabling a higher throughput rate. The reactor is also equipped with the "Split Jet" nozzle system, which optimizes deposition characteristics for a variety of materials. The nozzle also allows for a more uniform layer coverage and better cleaning performance across the entire business wafer. NOVELLUS Speed of this reactor is further increased with the use of its automatic, highLAM RESEARCH Speed robot for handling wafers and other process components. This robot increases throughput, reduces manual labor, and eliminates the possibility of contamination. The reactor's unique cross-flow design is extremely efficient, providing maximal wafer-processing Speed. The reactor also comes equipped with advanced safety features, such as both an electrical and chemical interlock system, an emergency shut down switch, configurable process handling, and inert gas interlocks. NOVELLUS Reactor offers a user friendly design and superior process control. The reactor is built to integrate with other process components, allowing for the production of advanced semiconductors with maximum efficiency and flexibility.