Used LAM RESEARCH / NOVELLUS Speed #9353432 for sale

LAM RESEARCH / NOVELLUS Speed is a reactive processing equipment used to provide high-end processing performance and efficiency when performing complex, high temperature and high purity chemical processes. It operates at a maximum temperature of up to 600°C, and is designed to be reliable with the ability to provide a high level of system performance and quality control. NOVELLUS Speed reactor's core components are a process chamber, dual gas sources, plasma power source, and multiple wafer baking ovens. The chamber is constructed of a robust stainless steel shell that supports the necessary insulation to withstand the high temperatures required for processing. Within the chamber is a rotating platen that holds a susceptor with the wafers to be processed. The dual gas sources supply the desired process gases required for each step of the process. The plasma power source is used to create a high intensity plasma to further refine the process gases in order to achieve precise control of the process parameters. The ovens are used to preheat and post-heat wafers to achieve improved processing and to achieve desired results. For plasma-enhanced processes, LAM RESEARCH Speed can handle a variety of different gases, including hydrogen, oxygen, nitrogen, argon, ammonia, chlorine, and a variety of other compounds. For physical vapor deposition processes, Speed is equipped with various sources for volatilization, such as electron beams, lamps, and quartz boats. LAM RESEARCH / NOVELLUS Speed offers exceptional performance in terms of NOVELLUS Speed of processing (due to its rapid temperature ramping rate), chamber uniformity, and the ability to provide an extremely low-pressure, low-energy environment for creating a stable process. Additionally, through its multiple plasma sources, advanced control systems, and sophisticated metrology unit, LAM RESEARCH Speed can achieve superior process performance in terms of deposition rates, uniformity, and wafer yields. Speed is an ideal choice for those seeking a solution for advanced process manufacturing and device manufacturing. LAM RESEARCH / NOVELLUS Speed offers robust construction, precision controls, and outstanding process quality, making it an excellent choice for those looking for a reliable, high-performance processing machine.