Used LAM RESEARCH / NOVELLUS VECTOR EXPRESS AHM #293644141 for sale

LAM RESEARCH / NOVELLUS Vector Express AHM is an advanced high-productivity chemical vapor deposition reactor designed for high-volume semiconductor manufacturing. This reactor is capable of depositing large-area dielectrics and metals, such as high-k dielectrics and metal alloys, for integrated circuit device fabrication. Its wide range of deposition processes allow it to support a variety of applications and materials. NOVELLUS Vector Express AHM has a modular design and is easy to install and set up to meet substrate handling and throughput requirements. It features large automated cassette load ports for easy loading and unloading of wafers and a conveyor belt system for tracks. Its advanced deposition chamber design includes instrumentation for monitoring and controlling process uniformity as well as automated software for controlling process conditions. LAM RESEARCH Vector Express AHM also features multiple gas inlet valves which allow it to support a wide range of deposition processes. In addition, it is equipped with a precurser mixing and delivery system, allowing for precise control of film composition. This ensures that the deposition chemistry is accurately met, resulting in higher quality films. Besides the quality of its films, Vector Express AHM also offers a number of features that contribute to its productivity. Its high deposition rate provides higher production throughput than other CVD reactors, and its advanced process control ensures greater uniformity across the entire wafer. Its efficient automatic wafer handling system reduces cycle times and cost of ownership, while its integrated safety features ensure operator protection. Overall, LAM RESEARCH / NOVELLUS Vector Express AHM is an ideal CVD reactor for high-volume IC device manufacturing. Its advanced design and features make it a reliable and efficient solution for the deposition of quality films. Its perfect combination of process control, efficiency, and safety make it an ideal choice for the most demanding applications.