Used LAM RESEARCH / NOVELLUS Vector XT #293649596 for sale

LAM RESEARCH / NOVELLUS Vector XT is a reaction chamber used for semiconductor processing. It is capable of providing high throughput and low cost-of-ownership for sequence-specific chemistries requiring ultra-high vacuum levels. NOVELLUS Vector XT is a leading tool for advanced material processing in several application-specific configuration, making it the perfect choice for critical fabrication steps such as etch and deposition. Designed as an integrated equipment, LAM RESEARCH Vector XT comes with an advanced RPC (Rapid Process Control) Module, allowing flexible and accurate process control, as well as reliable and safe operation. The performance of Vector XT surpasses that of conventional systems, with its high process repeatability and precision delivery. LAM RESEARCH / NOVELLUS Vector XT has the ability to carry out multi-step processing in a single chamber, enabling multiple operations to be completed in a shorter period of time. NOVELLUS Vector XT can be configured in either gas-phase or liquid-phase systems, allowing for a variety of applications. Additionally, LAM RESEARCH Vector XT has an advanced heating/cooling system, which allows for accurate and repeatable temperature control. Vector XT is also equipped with a patented, multi-effects-type exhaust unit, allowing for optimal efficiency and uniformity of exhaust. The unique design of the exhaust machine enables superior performance with low background pressures. The main feature of LAM RESEARCH / NOVELLUS Vector XT is its unique chamber geometry, which allows for unique sequences of substrate and process configurations. NOVELLUS Vector XT can achieve high levels of precision and throughput when used with suitable process gasses, lasers and pumps. In addition to its superior performance, LAM RESEARCH Vector XT also offers high levels of reliability, safety and stability. In order to ensure efficient operation, Vector XT undergoes stringent quality control on all hardware and software components and receives regular software updates. LAM RESEARCH / NOVELLUS Vector XT is compliant with the latest requirements and industry standards, including SEMI S2, S8, S18 and MIL STD 45662. NOVELLUS Vector XT is a revolutionary reaction chamber designed to provide superior performance in semiconductor processing. Its advanced features and high-precision performance make it an ideal choice for both large-scale and small-scale fabrication processes. LAM RESEARCH Vector XT allows for reliable and cost-effective production of advanced materials for use in a variety of industries.