Used LAM RESEARCH SOLA #9312000 for sale

LAM RESEARCH SOLA is a state-of-the-art reactor technology designed to maximize semiconductor production performance and device yield. SOLA technology is a plasma enhanced CVD (PECVD) deposition equipment that provides superior uniformity, repeatability, and deposition rate control. The system is capable of operating at low pressure to achieve high quality films with exceptional conformality and step coverage. The unit utilizes four independently controlled gas sources for a range of deposition configurations. An advanced timing machine is incorporated for precise synchronization between all reactants which helps to control the growth profile of the film. The process chamber can also be configured with a range of accessories such as showerheads for uniform gas distribution or a range of injection modules to allow for high-precision target and source gas dosing. The tool also features an advanced thermal control asset capable of both rapid heating/cooling while maintaining low temperature uniformity. This helps to achieve high yields from reliable deposition process recipes without unnecessary thermal stress. The thermal control model uses a combination of infrared heaters, turbomolecular pumps, and cold cathodes to manage the process environment. In addition, the equipment is equipped with numerous safety and monitoring systems to ensure optimum control of the process parameters and to protect personnel from potential hazards. The system includes leak detectors, interlocks, and a range of process control alarms which help maintain reliable process control and monitor unit operation. Overall, LAM RESEARCH SOLA is state-of-the-art technology that is reliable and repeatable, offering superior uniformity, deposition rate control, and film quality. Due to its superior performance, SOLA is suitable for applications in a wide range of industries, from optoelectronics to specialty chemicals.