Used LAM RESEARCH SOLA #9314232 for sale

LAM RESEARCH SOLA reactor is a advanced, state-of-the-art, flexible, plasma-based deposition tool for atomic-scale material deposition. It is designed primarily for a variety of semiconductor and surface engineering applications such as thin film deposition, electrostatic sputtering,, and ultra-thin film deposition. This tool utilizes a Non-Activated Dual Source Dual Electrode Plasma (NADSPL) architecture to allow for high-precision and repeatable deposition of very thin films (typically less than 0.01 hyper nanometer). In the NADSPL-based SOLA, two independent RF sources are employed to generate two distinct plasma sources; one for the main deposition process, and one for etching the workpiece. The design of LAM RESEARCH SOLA provides a single-reactor dual-plasma functionality in a single package, allowing for significant process throughput increases. SOLA also offers advanced ionization control plus a range of multi-power and multi-position plasma sources. Multi-power sources allow for the optimization of wafer profile across the entire substrate, while multi-position sources allow for the precise control of the process conditions during the deposition process. LAM RESEARCH SOLA comes with the newest technologies, including a broad range of specialized sensors, multi-sensor temperature controls, and the highest accuracy encoder equipment currently available. This system enables the precise placement of material within the process chamber to facilitate the creation of products that meet high standards of quality and performance. SOLA also features an advanced unit for mitigating particle contamination in the environment. The machine includes particle traps, filters, and systems for controlling the process gas composition. This ensures that the process is safe for both operators and the end products produced. Overall, LAM RESEARCH SOLA tool is an advanced tool for the deposition of ultra-thin films and other complex atomic-scale materials. It features a range of advanced technologies that improve product quality, reduce process costs, and minimize wasted time.