Used LPE PE 3061D #293747397 for sale

Manufacturer
LPE
Model
PE 3061D
ID: 293747397
Vintage: 2006
EPI Reactor GENMARK Robot Controller Gases: H2, N2, HC1, PH3, B2H6, PH3 PC Does not include liquid chlorosilane bubbler saturator Does not include scrubber 2006 vintage.
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