Used NOVELLUS C3 WTS #9240252 for sale

Manufacturer
NOVELLUS
Model
C3 WTS
ID: 9240252
Vintage: 2004
HDP CVD System 2004 vintage.
NOVELLUS C3 WTS is a high-performance heat-treating reactor that enables cost-efficient and efficient production of the latest microelectronic devices. It is an advanced thermal process reactor that can provide up to three times the throughput and quality of other reactors in the same class. C3 WTS has a chamber volume of more than 3 cubic feet and enables the rapid thermal processing of a substrate to temperatures of up to 900°C. It is based on a vertical multi-zone gas-flow equipment that uses high-velocity nitrogen to ensure precise temperature control. NOVELLUS C3 WTS incorporates an advanced temperature control system with a closed-loop feedback unit and multiple gas flow restriction machine, allowing for precise temperature zone segmentation. Its ceramic chamber liner is highly durable and can withstand long-term exposure to a wide range of temperatures. The integrated insulation is designed to minimize the loss of heat, ensuring efficient process operations and stable temperatures. C3 WTS also incorporates advanced process control technologies, including a host of sensors to monitor and enable predictive maintenance operations. This reactor also includes features such as automated cleaning, data collection, trending analysis, cycle optimization, and sample tracking. The reactor is equipped with advanced process control to enable exact temperature control and uniformity. This ensures consistent performance and repeatability for all substrates treated in NOVELLUS C3 WTS. It also uses advanced digital temperature controllers designed to provide accuracy and stable performance. Overall, C3 WTS is a high-performance heat-treating reactor designed to efficiently and cost-effectively produce the latest microelectronic devices. Its advanced temperature control tool ensures precise temperature control and uniformity, while its integrated sensors enable predictive maintenance operations and long-term durability. With reliable performance, efficient operations, and multiple process control features, NOVELLUS C3 WTS is a valuable asset for any modern microelectronic processing facility.
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