Used NOVELLUS Chambers for Inova #9355346 for sale

Manufacturer
NOVELLUS
Model
Chambers for Inova
ID: 9355346
Wafer Size: 12"
Vintage: 2012
Metal PVD system, 12" 2012 vintage.
NOVELLUS Chambers for Inova is an advanced process reactor that provides precise, repeatable control of both input and output parameters. This reactor allows users to accurately and consistently obtain desired results with minimal variation. It is ideal for the production of materials and components used in the electronics industry, such as semiconductors, microelectronics and photonics, as well as a variety of other advanced materials. Chambers for Inova consists of two chambers: a vacuum chamber and a reaction chamber. The vacuum chamber is used to reduce the pressure of the process materials, while the reaction chamber is used for mixing and reacting the materials. Both chambers feature gas and temperature regulation for precise control over the chemical reaction. In addition, the reaction chamber features advanced flow rate and temperature monitoring capabilities, allowing recipes to be precisely tuned. NOVELLUS Chambers for Inova also includes an integrated capacitive sensor that provides real-time feedback on film thickness and time remaining. This feature helps users monitor and optimize the deposition process for consistent yields and results. Chambers for Inova is designed to be easy to use and maintain. It features a fully integrated control system with a user-friendly graphical interface and an onboard recipe-creation tool. This simplifies the development of tailored recipes and helps reduce the learning curve common among users of new equipment. NOVELLUS Chambers for Inova also features advanced safety features, such as pressure release valves and an emergency shut-off system. These features allow users to safely work with potentially hazardous materials, reducing the risk of accidents or injury. Overall, Chambers for Inova offers a powerful and efficient process reactor that gives users exceptional control over their processes. This chamber is ideal for experimentation and production of the most advanced materials and components, while also ensuring users have a safe and comfortable working environment.
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